Vacuum Pump Inlet Trap features stackable design.
July 10, 2006 -
MV Multi-Trap® 16 in. Vacuum Inlet Trap has first stage knock-down baffle, multiple stages of user-selectable filtration, and cooling option for condensables. Suited for new or retrofit installation with 300 mm wafer fabricators and processes that generate large amounts of heavy particulates, this modular, clamp-together trap can be stacked to accumulate up to 2,500 in.³ of solids. Product provides up to 6 stages of replaceable filter elements.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Mass-Vac, Inc.
247 Rangeway Rd., P.O. Box 359
North Billerica, MA, 01862 0359
USA
Vacuum Pump Inlet Trap Stackable For High Solids Accumulation
A modular, high-capacity vacuum pump inlet trap for new or retrofit installation with 300 mm wafer fabricators and processes such as nitride, TEOS, TiN, AlO3, and BPSG that generate large amounts of heavy particulates has been introduced by MV Products of North Billerica, Massachusetts.
The MV Multi-Trap® 16" Vacuum Inlet Trap features a first stage knock-down baffle, multiple stages of user-selectable filtration, and can be equipped with a cooling option for condensables. Developed for processes that create large amounts of heavy particulates, this modular, clamp-together trap can be stacked to accumulate up to 2,500 in³ of solids, depending upon material.
Providing up to six stages of replaceable filter elements, the MV Multi-Trap® 16" Vacuum Inlet Trap is available with stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb® and other media to remove residual solvent vapor acids and particulates. Filter elements are offered 4.5" and 9" tall and the traps are made of 304 stainless steel.
The MV Multi-Trap® 16" Vacuum Inlet Trap is priced from $4,795.00 (list), depending upon configuration. Price quotations are available upon request.
For more information contact:
MV Products, Division of Mass-Vac, Inc.
Herbert R. Gatti, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014
e-mail: drolph@massvac.com (tech contact)
www.massvac.com
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