Vacuum Motors suit processes sensitive to magnetic fields.
June 18, 2002 - HR-V and HR-UV Series piezoelectric motors range in size from single element (providing .45 kg of force) to eight element (providing 3.6 kg of force). Suited for use in vacuum environments, HR motors are capable of driving linear and rotary stages. HR-V vacuum series motors are rated to 10E-7 Torr, and HR-UV motors are rated to 10E-10 Torr. Both configurations are suitable for bake out and operate without any magnetic field.
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Original Press release
Nanomotion
1 Comac Loop, Suite 14B
Ronkonkoma, NY, 11779
USA
Standard Vacuum and Ultra High Vacuum Piezoelectric Motors
Product Release: May 1, 2002
Nanomotion is pleased to introduce its family of HR-V and HR-UV Series motors for use in vacuum environments. With a size range from a single element (providing .45kg of force) to an eight element motor (providing 3.6kg of force) the HR series is capable of driving both linear and rotary stages. The HR-V vacuum series is rated up to 10-7 Torr and the HR-UV is rated up to 10-10 Torr. Both configurations are suitable for bake out and operate without any magnetic field, making them well suited to E-Beam writing and inspection and other processes that are sensitive to magnetic fields.
Nanomotion Inc. offers a wide range of unique piezoelectric motors based on ultrasonic standing waves, for advance motion control and automation systems. Nanomotion's patented technology offers exceptionally high resolution, unlimited travel, and no intrinsic magnetic field. The compact packaging and ability to drive linear or rotary devices make this technology well suited to applications in Semiconductor, Fiber Optic, Electronics, Bio-Medical/Pharmaceutical, Automotive, and General Assembly manufacturing equipment.
With over 20 patents issued for its piezo products and technologies, Nanomotion provides standard and custom motor and control configurations to meet a variety of performance criteria. Headquartered in Israel, worldwide support is provided by corporate offices in the United States, Europe, and Asia.
Source: Nanomotion Inc
Contact: Ernie Ponce
1 Comac Loop, Suite 14B
Ronkonkoma, NY 11779
Tel: 800-821-6266
Fax: 631-585-1947
email: eponce@nanomotion.com
www.nanomotion.com
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