Seal Materials work with aggressive plasma chemistries.September 18, 2009 -
Part of Parofluor ULTRA(TM) perfluorinated elastomer series, FF374-60 and FF376-80 are formulated for minimal particle generation and minimal extractable levels while maintaining low erosion rate in aggressive plasma chemistries. Both are deep purple in color and free of inorganic filler systems, ensuring minimal metal ion levels. They are recommended for various static and dynamic applications found in semiconductor deposition processes.
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Original Press release
Parker Hannifin Corp.
2360 Palumbo Dr., P.O. Box 11751
Lexington, KY, 40512
USA
Two New Parker Perfluorinated Elastomers Minimize Particle Generation and Extractables in Aggressive Plasma Chemistries
LEXINGTON, KY, July 14, 2009 - Parker Hannifin, the global leader in motion and control technologies, has developed two new seal materials - FF374-60 and FF376-80 - for minimal particle generation and minimal extractable levels while maintaining a low erosion rate in aggressive plasma chemistries.
FF374-60 and FF376-80 are the newest additions to Parker's Parofluor ULTRA(TM) series of perfluorinated elastomers. They have the lowest extractables in their class. Both materials are deep purple in color, and free of inorganic filler systems, ensuring low metal ion levels.
In applications where the size and volume of particles matter, not just any O-ring will do. O-rings made from these materials are recommended for various static and dynamic applications found in semiconductor deposition processes such as CVD, HDPCVD, SACVD, PECVD and etching and ashing.
To learn more about these innovative materials, please contact our applications engineering department at 859-335-5101. Parker's FF374-60/FF376-80 product bulletin and other literature can be obtained by calling Parker's catalog services department at 1-800-C-PARKER (For FF374-60 & FF376-80, reference bulletin ORD 5763. An electronic copy can also be viewed and downloaded from Parker's website by going to www.parkerorings.com and selecting bulletins from the literature menu.
Parker's O-Ring Division sealing products are at the leading edge of elastomer technology. We offer a broad spectrum of materials ranging from the chemically resistant, high temperature Parofluor(TM) and Parofluor ULTRA(TM), to a variety of premium elastomeric sealing materials. Whether it is an "off-the-shelf" industrial standard or a material in a custom size developed to customer specifications, our commitment to service is designed to minimize downtime and maximize quality. In addition to O-rings, Parker's O-Ring Division offers ParBak(TM) anti-extrusion rings, installation lubricants and O-Ring assembly and removal tools. Our manufacturing plants are ISO 9001, TS 16949 and AS 9100 registered.
With annual sales exceeding $12 billion, Parker Hannifin is the world's leading diversified manufacturer of motion and control technologies and systems, providing precision-engineered solutions for a wide variety of mobile, industrial and aerospace markets. The company employs approximately 62,000 people in 48 countries around the world. Parker has increased its annual dividends paid to shareholders for 52 consecutive years, among the top five longest-running dividend-increase records in the S&P 500 index. For more information, visit the company's web site at http://www.parker.com, or its investor information site at http://www.phstock.com.
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