Sample Vacuum Chamber enables safe transfer to probe station.
October 31, 2013 -
Miniature, transportable sample vacuum chamber can be used for transferring wafer/substrates under vacuum from glove box with special environment into vacuum or cryogenic micro-manipulated probe station (or into vacuum chamber) and back into glove box after testing, measurements, or preparations. Without requiring gate valves, product protects wafer/substrates from atmospheric contamination both on loading and unloading. Typical sizes are 50 mm dia and 25 mm thick.
|Original Press Release |
Janis Research Co., Inc.
2 Jewel Dr.
Wilmington, MA, 01887
Miniature Transportation Sample Vacuum Chamber for Micro-manipulated Probe Stations
Woburn, Massachusetts — Janis Research Company is pleased to announce that it is offering a patent pending, miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.
Unlike a common vacuum load lock the vacuum chamber has the following features.
- typical sizes of 50 mm diameter and 25 mm thickness
- no gate valves required
- very convenient and easy operation
- low cost
- mounting of the transportable sample mount without increasing base temperature of the cryogenic probe station
Janis Research Company, LLC
225 Wildwood Avenue
Woburn, MA 01801
Phone: +1 781 491-0888, extension 119