Robot System provides precise, repeatable wafer handling.
November 6, 2003 - Automated edge-grip system provides safe 300 mm wafer handling. Smart robot can see and measure environment with built-in optical sensor in end-effector and self-teach functionality. It detects wafer presence, measures wafer position, and calculates wafer center with 0.005 in. accuracy. Wafer is picked up and moved back before precisely controlled actuator is deployed to secure wafer against rest pads on end of gripper.
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Original Press release
Newport Corp.
1791 Deere Ave.
Irvine, CA, 92606
USA
Newport’s 300mm 'Smart' Edge-Grip Robot System Self-Teaches, Provides Precise, Repeatable Wafer Handling
Irvine, California – November 3, 2003 – Newport Corporation’s patented 300mm automated edge-grip robot system provides safe, precise, repeatable 300mm wafer handling with the aid of an integrated sensor system that saves time, adds flexibility, and enhances productivity in the semiconductor manufacturing markets.
Unlike other robot systems that may need to be taught by an expert technician for hours or even days, Newport’s 300mm Robot is “smart” – it can “see” and measure its environment with its built-in sensor and self-teach. The Robot becomes an automation expert itself, dramatically reducing time needed to bring the system online, providing easy interchangeability of robots, and allowing the customer to rapidly scale production capacity.
Moreover, Newport’s 300mm Robot can detect wafer presence and measure wafer position. It can calculate wafer center with an accuracy of 0.005”. The Robot’s patented technology that enables such consistent accuracy is an optical sensor built right into the robot end-effector. This allows the end-effector to map the location and presence of wafers in a cassette, and to measure wafer elevation and edge location. Thus, the Robot can calculate wafer position and allow for potential misalignment before moving in to pick up a wafer.
Knowing the actual position of the wafer allows the Robot system to ensure that the wafer does not strike the FOUP, because it is picked up and moved back before a precisely controlled actuator is deployed to secure the wafer against the rest pads on the end of the gripper. Additionally, the rest pads have a slight ramp and stop pad angle to provide true edge grip, minimizing the potential for wafer damage or contamination.
Newport's patented, state-of-the-art, 300mm wafer handling technology allows for higher throughput and yield improvements that translate into lower cost of ownership.
About Newport Corporation
Newport Corporation is a leading global supplier of advanced technology products and systems to the semiconductor, communications, electronics and research markets. The company provides components and integrated subsystems to manufacturers of semiconductor processing equipment, advanced automated assembly and test systems to manufacturers of communications and electronics devices, and a broad array of high-precision components and instruments to commercial, academic and government customers worldwide. Newport’s innovative solutions leverage its expertise in precision robotics and automation, sub-micron positioning systems, vibration isolation and optical subsystems to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor's Midcap 400 Index and the Russell 2000 Index. For more information, visit www.newport.com, or contact the company at 1791 Deere Avenue, Irvine, California, 92606, USA, Tel. (In U.S.) (800) 222-6440; Tel: (949) 863-3144; Fax: (949) 253-1800.
Company Contact:
David Rossi
Director of Marketing
Tel: 949.863.3144
Fax: 419.818.2656
E-mail: drossi@newport.com
Karl Mathia
Senior Product Manager, Robotics
Tel: 510.620.0235, x799
Fax: 510.620.0316
Email: kmathia@newport.com
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