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Robot Loading System enhances production ALD systems.

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March 7, 2014 - Based on industrial robotics, fully automatic sample handling system suits large scale batch Atomic Layer Deposition (ALD) reactors. Efficient production rate can be achieved by clustering several P-300B batch ALD tools and synchronizing sample loading/unloading of individual tools with robot. Other available sample handling options include linear loader, vacuum load lock, central vacuum robot sample handling unit, pneumatic chamber lift, and loading through inert atmosphere glove box.

Industrial Robotics Boost Picosun's Production ALD Systems


Picosun Oy
Tietotie 3
Espoo, Finland



Press release date: February 25, 2014

ESPOO, Finland -- Picosun Oy, the leading Atomic Layer Deposition (ALD) equipment manufacturer, has expanded its selection of high volume manufacturing solutions by launching a patented, fully automatic sample handling system based on industrial robotics.

The customer proven robot loading system is ideal for Picosun's large scale batch ALD reactors such as the PICOSUN(TM) P-300B and PICOSUN(TM) P-1000 models. An especially efficient production rate can be achieved by clustering several P-300B batch ALD tools together and synchronizing the sample loading and unloading of the individual tools with the robot.

Sample handling with an industrial robot is particularly suitable when processing large amounts of 3D objects such as automotive components and other mechanical engineering products, coins, OLED displays, powders, and articles for decorative coatings. Typically these are items which, when packed in large batches, require a sturdy and fast loading system capable of smooth handling of heavy loads, especially considering the high production throughput requirements for many industries. Batch pre-heating and/or post-deposition high temperature may also render manual handling impossible. Naturally, also large batches of silicon wafers or glass sheets can be easily manipulated with a robot.

In addition to industrial robotic systems, the sample handling options available for PICOSUN(TM) ALD tools now include a linear loader, vacuum load lock, central vacuum robot sample handling unit (for vacuum cluster configurations), pneumatic chamber lift (for manual operation), and loading through an inert atmosphere glove box.

"We are pleased to expand our already unrivalled selection of sample loading options with industrial robotics. The possibility to integrate fully automatic robot operation with our large scale production ALD tools enables us to technologically breakthrough to completely new high volume manufacturing application areas previously unknown to ALD," states Mr. Timo Malinen, Chief Operating Officer of Picosun.

Picosun's leading ALD thin film technology enables an industrial leap into the future by novel, cutting-edge coating solutions, with four decades of innovative and pioneering expertise in the field. Today, PICOSUN(TM) ALD systems are in daily production use in numerous prominent industries around the globe. Picosun is based in Finland, with subsidiaries in USA and Singapore, and a world-wide sales and support network.

Timo Malinen
COO
email: timo.malinen@picosun.com
tel. +358-50-321-1955
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