RF Power Supply System suits etch and deposition processes.July 27, 2007 -
Targeting semiconductor, FPD, MEMS, and solar photovoltaic manufacturing, Paramount(TM) RF-Power Delivery System enables power control and delivery across full output range, both on and off 50 W, for seamless process transitions in strip, PECVD, HDP-CVD, PVD, and PEALD. Half-rack, 3 kW unit has impedance measurement that enables power delivery and control at 13.56 MHz fixed or variable frequencies, and can keep pace with abrupt plasma-impedance changes.
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Original Press release
Advanced Energy Industries Inc.
1625 Sharp Point Dr.
Fort Collins, CO, 80525
USA
Advanced Energy® Unveils Its Newest Process-Power Platform: The Paramount(TM) RF Power-Delivery System
Breakthrough RF technology keeps pace - in real time - with the most abrupt plasma-impedance changes, enabling faster transitions, shorter process steps and reduced process times
FORT COLLINS, Colo., July 3, 2007 - Advanced Energy® Industries, Inc. (NasdaqGM: AEIS) today announced its newest power platform: the Paramount(TM) RF-power delivery system. Featuring unprecedented power-delivery accuracy and control for increasingly complex film stacks and fine feature sizes, the 3 kW Paramount system is well suited for both etch and deposition processes in semiconductor, FPD, MEMS and solar photovoltaic manufacturing. AE® will highlight the new Paramount platform during SEMICON® West 2007, to be held July 17-19 at San Francisco's Moscone Convention Center.
Next-generation device fabrication processes feature anti-reflective coatings, hard masks, cap layers and stop layers in their recipes. Process designers must account for these layers while at the same time accurately etch or deposit the primary layer that may comprise multiple compositions and doping profiles. The Paramount platform easily accommodates these complexities with ultra-accurate power control and delivery across the full output range-both on and off 50 Ω-for seamless process transitions in etch, strip, PECVD, HDP-CVD, PVD and PEALD. Where pulsing is required to enable next-generation process steps, the Paramount system's optional pulse and pulse synchronization features offer the widest pulse-frequency range available.
Hans Betz, president and CEO of AE noted, "The Paramount system continues AE's tradition of enabling process-power innovation. This new platform has also facilitated AE's continued, technical collaboration with our valued OEM customers. Paramount systems are already installed on next-generation etch platforms at major OEMs worldwide."
The Paramount RF power-delivery system raises the bar for RF power products-offering the finest control in the industry, with breakthrough performance and technology. This half-rack, 3 kW RF power supply's impedance measurement rivals the accuracy of a network analyzer, enabling unprecedented power delivery accuracy and control at 13.56 MHz fixed or variable frequencies. Able to keep pace-in real time-with the most abrupt plasma-impedance changes, the Paramount system enables faster transitions, shorter process steps and reduced process times, while optional frequency tuning performs virtually instantaneously (within msec)-faster than any other product on the market. The result is truly unprecedented accuracy, repeatability and process control-for 50 W and non-50 W loads.
To learn more about AE's new line of Paramount RF power systems during SEMICON West, visit the company in booth #2202 in the South Hall at Moscone Convention Center in San Francisco and visit advanced-energy.com/en/Paramount.html. Editors interested in meeting with AE during the show may contact Angie Kellen by phone: 650.968.8900 x120, or email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy develops innovative power and control technologies that drive high-growth, plasma thin-film manufacturing processes worldwide, including semiconductors, flat panel displays, data storage products, solar cells, architectural glass and other advanced product applications.
AE's product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions aimed at maximizing process impact, improving productivity and lowering cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq Global Market under the symbol AEIS. For more information, go to advanced-energy.com.
CONTACTS:
Marna Shillman
Director, Global Marketing Communications
Advanced Energy Industries, Inc.
970.407.6280
marna.shillman@aei.com
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