RF Power Generator suits PV, LED, and MEMS applications.
August 15, 2011 -
Available in 2U full rack and 3U half rack enclosures, elite(TM) RF Generator comes in power levels of 300, 600, and 750 W. Full rack design eliminates cables and connectors, while inductive clamp technology protects generator from adverse VSWR load conditions. Air-cooled, single phase, 13.56 MHz generator is suited for amorphous thin film solar manufacturing, LED passivation and etch, MEMS, and semiconductor processes including PVD, CVD, ALD, strip, and etch.
Original Press release
MKS
Six Shattuck Rd., Dept. T
Andover, MA, 01810 2449
USA
MKS Introduces the elite(TM) RF Power Generator
A cost-effective, compact solution for photovoltaic, LED and semiconductor processing
Andover, MA, - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the elite(TM) RF Power Generator for amorphous Si PV, LED and MEMS applications. The elite(TM) generator's integrated, single PCBA design offers exceptional reliability, and its air cooled, compact, light weight design provides a cost-effective, easy-to-install solution for RF deposition and etch needs.
The elite(TM) RF generator is available in 2U full rack and 3U half rack enclosures to allow for rack mounting, and is available in power levels of 300W, 600W and 750W. The robust, full rack design eliminates cables and connectors, while the patented inductive clamp technology protects the generator from adverse VSWR load conditions. The air-cooled, single phase, efficient 13.56 MHz generator results in low cost-of-ownership.
The elite(TM) RF generator can be used for amorphous thin film solar manufacturing, LED passivation and etch, MEMS and semiconductor processes including PVD, CVD, ALD, strip and etch. The elite(TM) generator can also be applied for cleaning, surface treatment and coating of medical components; and back end electronic packaging.
About MKS:
MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.
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