Quadrupole Mass Spectrometer provides residual gas analysis.
Quadrupole Mass Spectrometer provides residual gas analysis. |
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February 14, 2006 -
Useful for leak detection and system monitoring, Qulee features removable front-end electronics package that permits replacement of quadrupole analyzer. Integrated control display on electronics box eliminates need for PC to operate unit, and provides one-touch partial pressure readout of He, H2O, N2, O2, O2/N2 ratio. Featuring built-in setpoints with serial I/O remote control, unit has max operating pressure of 2 Pa and minimum detectable partial pressure of 1 x 10-10 Pa.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Ulvac Technologies, Inc.
401 Griffin Brook Dr.
Methuen, MA, 01844
USA
ULVAC Technologies, Inc. Introduces New Residual Gas Analyzer, Qulee
Methuen, Massachusetts - ULVAC Technologies, Inc. (www.ulvac.com), a leading supplier of production systems, instrumentation, and vacuum pumps for a variety of industries, introduces the Qulee quadrupole mass spectrometer with integrated measurement display and control electronics. Designed primarily for end users, this compact, lightweight mass spectrometer is suitable for OEM use as well.
The Qulee features a removable front-end electronics package that permits easy and cost-effective replacement of the quadrupole analyzer. With the electronics removed the analyzer head can be baked at temperatures of up to 250°C. An integrated control display on the electronics box eliminates the need for a PC to operate the unit. One-touch control displays the partial pressure readout of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass 1 - 50 amu. Useful for leak detection and system monitoring, the built-in setpoints with serial I/O remote control, RS232C and 485 outputs and easy to use software enable Qulee to also be used for residual gas analysis (RGA) and process gas monitoring in PVD systems. A maximum operating pressure of 2 Pa can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 x 10-10 Pa.
About ULVAC Technologies, Inc.
Founded in 1992, ULVAC Technologies, Inc. is a leading supplier of production systems, instrumentation, vacuum pumps and components for the semiconductor, research, automotive, medical, electrical, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC Inc., which is comprised of 39 companies engaged in most sectors of the vacuum industry.
For more information, contact ULVAC Technologies, Inc., 401 Griffin Brook Drive, Methuen, MA 01844; p: 978-686-7550; f: 978-689-6300; email: sales@ulvac.com. Information is also available on the company's web site at www.ulvac.com.
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