Pump Filter features reverse pulse technology.February 27, 2012 -
Reverse Pulse Filter integrates Reverse Pulse Technology (RPT) with high-capacity filter element to extend maintenance intervals and help increase runtime and decrease element changes. It also reduces risk of backstreaming, prevents particles from contaminating pump oil, and prevents buildup and seizing of dry pumps. With stainless steel construction and quick-change filter element, RPT can be applied to crystal-growing and LPCVD tube furnaces, gas pad applications, and wet/dry vacuum pumps.
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Original Press release
Ebara Technologies
51 Main Ave.
Sacramento, CA, 95838
USA
EBARA Technologies Launches Reverse Pulse Technology (RPT)
Sacramento, California. EBARA Technologies, Inc., a leading manufacturer in the semiconductor industry for dry pumps, vacuum components, and repair services, is proud to announce our Reverse Pulse Technology (RPT).
EBARA designs and manufactures application-specific filtration products capable of operating in harsh environments while safeguarding operators and mission-critical equipment. EBARA's Reverse Pulse Filter integrates proven Reverse Pulse Technology with a high capacity filter element to extend maintenance intervals, resulting in increased runtime and fewer element changes. When using EBARA's RPT, the maintenance interval is increased while also protecting the vacuum pumps. With lower maintenance costs, RPT will reduce the risk of backstreaming, prevent particles from contaminating pump oil, and prevent the buildup and seizing of dry pumps. With its stainless steel construction and quick-change filter element, RPT can be applied to crystal-growing furnaces, LPCVD tube furnaces, gas pad applications, wet and dry vacuum pumps, and much more. Custom designs and other options are available upon request.
To request additional information about Reverse Pulse Technology or any other EBARA product, please call 800-535-5376, or email us at info@ebaratech.com.
About EBARA Technologies, Inc.
EBARA Technologies, Inc. is a U.S. based subsidiary of EBARA Corporation, a Japanese company founded in 1912, which provides a wide range of technologies including equipment, systems and services for water, air and the environment. EBARA Technologies, Inc. is a leading global innovator and worldwide supplier of vacuum technologies and advanced wafer-processing equipment for clean environments within the semiconductor industry. EBARA manufactures a full line of Dry Mechanical Pumps, Mag-lev Turbo and Hybrid Turbomolecular Drag Pumps for the semiconductor industry's toughest applications, including LPCVD, etch, EPI and Ion Implant. The company's offerings also include a complete line of Vacuum Valves and Fittings, Heaters for vacuum and exhaust lines, Point-of-Use Abatement systems, Ozonized water and gas equipment. Our systems group manufactures Chemical Mechanical Polishers (CMP). EBARA Chemical Plating Systems (ECP), and Through-Mask Plating Systems (ThMP). EBARA maintains a superior sales and support network in the U.S. and worldwide. www.ebaratech.com
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