Power Supplies support electrostatic chucks.
July 1, 2011 -
Housed in 9 x 1.5 x 6.1 in. package designed for OEMs, ESC Series provides accurate voltage required for semiconductor-based electrostatic chuck wafer applications. Regulated units precisely secure wafers during lengthy process cycles. Versions are available with ground referenced reversible output as well as with true floating bipolar output and associated floating center tap point. Fault diagnostic circuitry monitors power supply functionality and communicates status to user interface.
Original Press release
Spellman High Voltage Electronics Corp.
475 Wireless Blvd.
Hauppauge, NY, 11788
USA
Spellman Introduces Its New ESC Family of Electrostatic Wafer "Chuck" Modules
The High Voltage Innovator Unveils New Series for the Semiconductor Market
Hauppauge New York - Spellman High Voltage Electronics Corporation, the world's leading manufacturer of custom high voltage power conversion products, announces the introduction of its new ESC Series electrostatic chuck high voltage power supplies.
The ESC Series features clean, accurate and easily controllable voltages required for semiconductor based electrostatic chuck wafer applications. These well regulated supplies precisely secure wafers during lengthy process cycles. Versions are available with a ground referenced reversible output, in addition to units featuring a true floating bipolar output with associated floating center
tap point.
Comprehensive fault diagnostic circuitry monitors power supply functionality and communicates status data to the user interface. Spellman's ESC Series power supplies are housed in compact, lightweight packages designed for OEM installations requiring minimal system footprint space.
Technical literature and additional information on the ESC Series can be obtained at: www.spellmanhv.com/datasheets/esc
Information on Spellman and their wide range of high voltage products is available by calling +1-631-630-3000, or by visiting their website: www.spellmanhv.com
Spellman High Voltage Electronics is the world's leading provider of custom designed and standard AC-DC and DC-DC high voltage power converters and Monoblock® X-Ray sources for medical, industrial, semiconductor, security, analytical, laboratory, and under-sea cable power-feed applications. With design, manufacturing and service facilities in the US, UK, Mexico, China and Japan, and direct sales offices throughout Europe, Asia and North America, Spellman is committed to supporting advanced system providers and their customers throughout the world.
Visit Spellman High Voltage Electronics Corporation at http://www.spellmanhv.com
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