Perfluoroelastomer Parts help improve semiconductor processes.June 29, 2011 -
Kalrez® 9300 parts offer balanced performance in remote and in-situ plasma for etch process manufacturers. For deposition processes where ozone is prominent, Kalrez® 9500 provides manufacturers with parts that demonstrate resistance to process chemistry. Additional applications for low outgassing Kalrez 9500 parts, resistant to ozone, ammonia, and water vapor, include SACVD and ash/strip processes. Max continuous service temperature rating is 310°C.
Original Press release
DuPont Co., Packaging & Industrial Polymers
1007 Market St.
Wilmington, DE, 19898
USA
DuPont Introduces Two New Products to Improve Uptime in Demanding Semiconductor Processes
Chip Manufacturers Invited to Collaborate on New Products to Improve Process Performance
WILMINGTON, Del. - DuPont Performance Polymers (DuPont) will introduce DuPont(TM) Kalrez® 9300 and 9500 perfluoroelastomer parts for semiconductor wafer processing at Semicon West Booth 2523 in San Francisco, July 12-14.
Etch process manufacturers will see how Kalrez® 9300 parts offer balanced performance in both remote and in situ plasma. In demanding deposition processes where ozone is prominent, manufacturers will see how Kalrez® 9500 demonstrates excellent resistance process chemistry.
Kalrez® 9300 Resists Aggressive Oxygen and Fluorine-based Plasma
Chip manufacturers who utilize oxygen (O2) and fluorine-based (CF4) plasma for wafer etch may experience unacceptable erosion of the sealing material when seals are exposed to aggressive processing or cleaning chemistry. Elastomers typically erode and cause unwanted particles in such ion-rich environments, but through advanced proprietary technology, DuPont developed Kalrez® 9300 perfluoroelastomer parts for balanced performance in a variety of challenging etch conditions.(Figure 1) "There are several variables in etch processes that make exceptional sealing performance difficult," said Dave Lipnicke, global semicon market manager, DuPont(TM) Kalrez® and Vespel®. "Our customers were using many products to solve a variety of sealing issues. 9300 allows them to use one product for outstanding, all around performance."
Exceptional Resistance to Ozone with Kalrez® 9500
For SACVD and ash/strip processes, Kalrez® 9500 has demonstrated ultra-low weight loss in remotely generated plasma and offers excellent resistance to ozone, ammonia and water vapor. "Chip manufacturers continue to employ more aggressive process chemistry that can damage seal materials," said Lipnicke. "Our proprietary technology has better resistance to oxygen and fluorine radicals that can erode traditional seal materials." Kalrez® 9500 also has excellent heat resistance with very low outgassing and has a maximum continuous service temperature rating of 310 °C.
DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in approximately 80 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation.
Kalrez® 9300 parts are based on a proprietary crosslinking and mechanical reinforcement system now available from DuPont.
The DuPont Oval Logo, DuPont(TM), The miracles of science(TM), and Kalrez® are registered trademarks or trademarks of DuPont or its affiliates.
Reader inquiries should be directed to the following:
800-222-8377
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