Optical Chamber can be used with UV excimer beams.
Optical Chamber can be used with UV excimer beams. |
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December 15, 2005 -
Accommodating various optics mounts and allowing precision adjustments in X, Y, Z, and theta dimensions, optical chamber allows users to modify, shape, or expand UV excimer laser beam through beam-shaping telescopes, beam homogenizers, imaging lenses, condensing lenses, and other optics. With 50 x 50 mm aperture, chamber allows passage of homogenized beam without corner clipping. Vacuum capable module can be used with short-wavelength UV excimer beams including 157, 193, and 248 nm.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
JP Sercel Associates, Inc.
220 Hackett Hill Rd.
Manchester, NH, 03102
USA
JPSA Introduces Optical Chamber for VUV Beam Delivery
Hollis, New Hampshire, USA - J P Sercel Associates (JPSA) introduces its new large-format VUV (vacuum UV) optical chamber for UV excimer laser beam delivery systems. The Optical Chamber is the latest addition to JPSA's new large-format line of beam delivery system modules, options, and components, and is designed to integrate with JPSA's recently-introduced Microtech MBD2 industrial-grade Beam Delivery System (BDS). Lenses, beam expanding telescopes, beam homogenizers, spacers, and other components can be positioned in the chamber and integrated into the BDS using JPSA's universal dovetail mounting system. The optical chamber features a 50mm x 50mm clear aperture that allows passage of a larger-diameter homogenized beam without beam corner clipping. The chamber is designed for many different types of optics mounts with precision adjustments in the X, Y, Z, and theta dimensions, allowing the user to modify, shape, or expand the UV excimer laser beam through the use of beam-shaping telescopes, beam homogenizers, imaging lenses, condensing lenses, and other optics. All can be accessed through O-ring sealed removable panels.
The new optical chamber is a vacuum (VUV) capable module, and can be used with short-wavelength UV excimer beams including 157nm, 193nm, and 248nm. There is no grease or oil in any of JPSA's VUV beam delivery designs, and all organic materials have been removed to prevent degradation by UV radiation and consequent contamination of the optics and interior chambers. The absence of such contaminants contributes to longer optics life. JPSA's optical chamber can be purged with high-purity gases such as nitrogen.
JPSA products and services include UV excimer and DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835.
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