Optic Fiber Thermometers target semiconductor processes.August 1, 2006 -
Designed for RTP, HDP-CVD, epi, ALD, and HDD applications, Model OR4000T provides multi-channel temperature measurement and enables integrated measurements within multiple chambers. Model OR4000E offers same performance with added real-time emissivity compensated temperature measurement and ability to support growth rate monitoring. Single-channel Model OR400T provides non-contact, in-situ temperature measurement and immunity from RF noise.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Advanced Energy Industries Inc.
1625 Sharp Point Dr.
Fort Collins, CO, 80525
USA
Advanced Energy® Unveils New Line of Sekidenko Multi-Channel Optical Fiber Thermometers and Emissometers
New product family offers shorter processing times and increased productivity for multiple semiconductor processes
FORT COLLINS, Colo., June 27, 2006 -Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced its new line of Sekidenko optical fiber thermometers (OFTs) and emissometers comprised of the OR4000T, OR4000E and OR400T family of products. AE®'s OFTs are ideally suited for tightly controlled, temperature- and emissivity-dependent applications such as laser annealing, RTP, MO-CVD, PE-CVD, PVD, metal etch and other applications. The new Sekidenko product family offers original equipment manufacturers (OEMs) the exceptional stability and product flexibility needed to meet the increasingly stringent demands of today 's leading semiconductor applications. AE will introduce the new OR4000 product family during SEMICON® West 2006, to be held July 11-13 at San Francisco 's Moscone Convention Center.
AE's advanced Sekidenko thermal instrumentation products provide OEMs with superior, non-contact temperature and emissivity capabilities for semiconductor processes where uniform substrate temperatures enable critical process results and enhanced throughput and yield. Modular in design, AE 's OR4000T and OR4000E can be rapidly tailored to meet the unique requirements of each process application.
Chuck Gooding, vice president of the Sekidenko product line, noted, "AE's Sekidenko instrumentation delivers the high stability, exceptional repeatability and precision required for advanced, volume-production environments. Based on the successful OR2000 family, this new line of OFTs continues AE's best-of-breed tradition. Our dedication to technology innovation exemplifies our commitment to increasing our customers ' competitive advantage. "
OR4000T Multi-Channel OFT
The OR4000T provides multi-channel temperature measurement and enables uniform, integrated measurements within multiple chambers. Designed for RTP, HDP-CVD, epi, ALD and HDD applications, the OR4000T supports read rates up to 2 KHz for the most demanding semiconductor applications.
OR4000E Real-Time Emissivity Compensated OFT
The OR4000E delivers the same high speed performance as the OR4000T with the added benefit of real-time emissivity compensated temperature measurement and the capability to support growth rate monitoring typically required for MO-CVD applications. Designed for RTP, HDP-CVD, MO-CVD and UV cure, the OR4000E provides accurate temperature and emissivity measurements across a wide variety of processes.
OR400T Precision, Single-Channel OFT
The OR400T is a precision instrument that enables cost-effective temperature measurement in a compact form factor. The single-channel product provides a cost competitive alternative to thermocouples with the added benefit of non-contact, in-situ temperature measurement and immunity from RF noise. The OR400T is ideally suited for several high-volume semiconductor applications including PE-CVD, LP-CVD, PVD and metal etch.
To learn more about AE 's new line of OFTs and emissometers during SEMICON West, visit the company in Booth #2202 in the South Hall at Moscone Convention Center in San Francisco. Editors interested in meeting with AE during the show may contact Angie Kellen by phone: 650.968.8900 x120, or email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy® develops innovative power and control technologies that drive high-growth, plasma thin-film manufacturing processes worldwide, including semiconductors, flat panel displays, data storage products, solar cells, architectural glass and other advanced product applications.
AE®'s product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions aimed at maximizing process impact, improving productivity and lowering cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, go to advanced-energy.com
CONTACT:
Marna Shillman
Corporate Communication Manager
Advanced Energy Industries, Inc.
970.407.6280
marna.shillman@aei.com
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