Mass Flow Controllers accommodate FS flow rate to 55 slpm.August 20, 2010 -
Modular and user-programmable, ultra-high purity GF Series employs MultiFlo(TM) technology that facilitates reprogramming of gas and full scale (FS) range in less than 30 sec without removal from gas line. Accuracy is optimized via application of gas modeling and compensation for non-ideal/non-linear gases. Along with flow settling times from 300 msec to 1 sec, controllers feature all-metal flow path, NO or NC valves, and multiple communication protocols.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Brooks Instrument
407 W. Vine St.
Hatfield, PA, 19440
USA
New Full Scale Flow Rate to 55 slpm and Normally Open Valve Option Now Available
HATFIELD, PA - Brooks Instrument, a world-leading provider of advanced flow measurement, control and level solutions, has released new product enhancements to the GF Series ultra-high purity mass flow controllers. The GF Series is a highly modular, user-programmable, metal-sealed mass flow controller that delivers a new level of performance and flexibility. Brooks has increased the range of flow rates available on the GF Series from the current 3 sccm to 30 slpm to a new full-scale flow rate of 55 slpm.
"The GF Series install base is growing by the thousands, and we're continuing to expand the platforms functionality to meet our customers' needs and exceed expectations," said Shaun Pewsey, Director of Field Marketing at Brooks Instrument. "The GF Series delivers market-leading process gas accuracy, repeatability and response, which has been proven in a diverse range of applications including semiconductor, biotechnology, analytical systems, microelectronics, solar cell manufacturing and general research."
At the heart of the GF Series is Brooks MultiFlo(TM) technology, a powerful feature which enables simple re-programming of the gas and full scale range in less than 30 seconds without removing the mass flow controller from the gas line. A major advancement over traditional single point gas conversion factors, MultiFlo(TM) mass flow controllers can deliver up to a three-times improvement in accuracy through the application of advanced gas modeling and compensation for non-ideal/non-linear gases. Selecting a new gas automatically establishes optimized PID settings for dynamic control, compensates for gas density effects and ensures smooth overshoot-free transitions between flow rates with excellent steady state stability.
GF Series flow settling time ranges from market-leading ultra-fast 300 ms (GF125) to
one-second (GF100/120). For applications requiring a slower flow response, a user-programmable ramp function linearly transitions the flow between set points over a period of up to one hour with a resolution of 2 ms. All of these features are easily accessible through the independent service and diagnostic port.
The all-metal flow path ensures compatibility with all gas media, while the GF's minimal internal surface area and fully swept flow path ensures rapid purge and clean up, enabling customers to change between gases for maximum flexibility.
Offered in full-scale ranges from 3 sccm to 55 slpm with normally open or normally closed valves and multiple communication protocols, including Analog 0-5VDC, RS485 and DeviceNet, the GF Series is a state of the art upgrade for most thermal mass flow controllers.
About Brooks Instrument
Brooks Instrument, LLC, based in Pennsylvania, is a company of highly trained specialists whose goal is to provide flow solutions that exceed customer expectations. The Company has a proven history of innovation including the first miniaturized Coriolis mass flow controller (Quantim), the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series), and the first variable area meter with Foundation Fieldbus (MT3809 & MT3750). Today, Brooks Instrument's portfolio includes glass and metal tube variable area meters (rotameters), thermal mass flow controllers and meters, Coriolis mass flow controllers, meters and transmitters, pressure control products, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit BrooksInstrument.com.
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