Semiconductor Processing Equipment
Mass Flow Controller aids semiconductor manufacturers.
Press Release Summary:
Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities that verify accuracy, check valve leak-by, and monitor sensor drift, semiconductor manufacturers can maintain uniformity in etch profiles and critical dimensions.
Original Press Release:
New GF135 PTI Mass Flow Controller
Revolutionizes Advanced Process Control for Semiconductor Manufacturers
HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum, level and vapor delivery solutions, has launched the GF135, a revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing. The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement and advanced diagnostic capabilities to verify accuracy, check valve leak-by and monitor sensor drift without stopping production of wafers. These game-changing features can lead to thousands of dollars in daily cost savings for manufacturing facilities.
The GF135 provides market-leading process gas accuracy and ultra-fast flow settling time for reduced process cycle times. The device uses Brooks’ patent-pending real-time rate-of-decay flow error detection technology to continually test for changes in the device’s performance. Data can be used to improve accuracy at critical low-flow set points, set up alarm limits for critical performance parameters and monitor trends for predictive maintenance. These diagnostics help identify and correct issues before they occur, preventing downtime and wasted wafers.
Unlike other mass flow controllers, the GF135 features “smarter” functionality with advanced zero drift and valve leak-by diagnostics. Onboard diagnostic logging, zero stability trending and correction, and early detection of valve corrosion or clogging allow semiconductor manufacturers to achieve tighter tolerances and maintain uniformity in etch profiles and critical dimensions. The combination of these features allows the GF135 to deliver exceptional accuracy and cost savings to semiconductor companies.
For more information about Brooks Instrument’s GF135, visit www.brooksinstrument.com/gf135.
About Brooks Instrument
Brooks Instrument, LLC, based in Pennsylvania, is a multi-technology instrumentation company serving a range of demanding markets. The Company has a proven history of innovation, including the original commercial design that set the standard for today’s thermal mass flow controllers, the first high-performance digital mass flow controller, the first gas and range programmable thermal mass flow controller (MultiFlo™), the first watertight and explosion-proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series) and the first variable area meter with Foundation Fieldbus (MT3809 & MT3750). Today, Brooks Instrument’s portfolio includes glass and metal tube variable area meters (rotameters), thermal mass flow controllers and meters from ultra-high purity to industrial grade, Coriolis mass flow controller (Quantim), vacuum measurement and pressure control products, direct liquid injection vapor delivery systems, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments, which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit www.BrooksInstrument.com. Also visit us on Twitter (www.twitter.com/BrooksInstrmnt), LinkedIn (www.linkedin.com/company/Brooks-Instrument) and Facebook (www.facebook.com/BrooksInstrumentLLC).
