Load Port meets wafer isolation and fab requirements.October 12, 2009 -
Automatic Door Opener(TM) delivers operational speed, cleanliness, reliability, and integration flexibility for loading/unloading SEMI standard 300 mm FOUPs. With MCBF over 650,000 cycles and calculated MTBF over 20,000 hr, system delivers better than Class 1 particle performance when integrated in Class 100 or better environment. It requires no periodic lubrication or re-alignment and utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for repeatable motion.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Kensington Laboratories
750 National Ct.
Richmond, CA, 94804
USA
Kensington Laboratories Introduces New Load-Port
Hayward, CA -Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener(TM) (ADO), a 300mm Load Port designed for today's rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington's ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington's global service and support network.
Providing Load-Ports since 2000
Named 'Best in Class' by large process OEM Fastest Throughput (2x faster)
-High Reliability: Demonstrated MCBF > 650,000 cycles, Calculated MTBF > 20,000 hrs, Zero PM, Zero Particles
-Industry compliance: Drop in replacement, Semi Bolts Compatible
-Interoperability: Fully compatible with all SEMI standard FOUPs.
-Cleanliness: Better than Class 1 particle performance when integrated in Class 100 or better environment.
-Reliability: Robust design combined with precision assembly achieves superior dependability and lifetime performance.
-Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or re-alignment.
-Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion.
-Wafer Mapping: High performance Break-The-Beam wafer mapping option allows fast, accurate wafer detection.
-Fab Customization: Configurable features include programmable lights, buttons, carrier ID, and AMHS options.
-Compliance*: SEMI, S2, S8, CE, and F47 compliant.
-Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch).
http://www.kensingtonlabs.com/
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