ThomasNet News Logo
Sign Up | Log In | ThomasNet Home | Promote Your Business

High Flow Filters supports transition to 450 mm wafer equipment.

Print | 
Email |  Comment   Share  
High Flow Filters supports transition to 450 mm wafer equipment.
High Flow Filters supports transition to 450 mm wafer equipment.
Click Here to Enlarge Picture
June 28, 2012 - Respectively accommodating 300 and 600 slpm flow rates in filter lengths of 3.31 and 5.0 in., Defender Series all-metal gas filter meets Semi requirements for 9 LRV (99.9999999% efficiency) down to 0.003 m at recommended flow rate. Degree of pressure drop allows reduction of vacuum conductance, accelerating wafer chamber evacuation and fill. Supporting diverse applications in semiconductor industry, filters have operating pressures to 2,500 psig and operating temperatures to 450C.

Mott Defender High Flow Filters for 450 mm Semiconductor Tools

(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)

Mott Corporation
84 Spring Lane
Farmington, CT, 06032 3159

Press release date: June 1, 2012

FARMINGTON, CT - Mott Corporation announces their newest all-metal filter design that accommodates the smallest high purity gas filter footprint to date. This filter design is the only one available that meets the Semi requirements for 9 LRV (99.9999999% efficiency) down to 0.003 m at the recommended flow rate. It was specifically developed to support the industry's transition to 450 mm wafer equipment.

As part of Mott's Defender Series Filters, this filter can accommodate flow rates of 300 slpm in filter length of 3.31 inches (84 mm) or 650 slpm (127 mm) in lengths of 5.0 inches. This all-metal filter provides an extremely low pressure drop for the reduction of vacuum conductance allowing for fast wafer chamber evacuation and fill. And with operating pressures up to 2,500 psig and operating temperatures up to 450C, the Defender Series can support virtually every application in the semiconductor industry.

Mott is the first to offer an all-metal gas filter that can provide these efficiencies and these very high flow rates in such small footprints. As the semiconductor, flat panel display and photovoltaic industries look to increase flow requirements in their manufacturing processes, Mott filters are there to meet the challenge.

Mott Corporation design teams have been engineering solutions and developing the technology of porous metal for over 50 years. This newest innovative development attests to Mott's unique ability to modify current geometries and designs to accommodate performance and industry requirements.

As the leading worldwide manufacturer of quality all-metal gas filtration and flow control products for the semiconductor industry, Mott offers the most complete range of all-metal filter products available in the market today. From large bulk gas filter systems capable of handling the highest flow rates, down to sub-liter per minute flow devices, these products come with the best warranty in the industry.

For additional information regarding Mott Corporation and its High Purity Products, please feel free to contact Sales and Marketing, 84 Spring Lane, Farmington, CT 06032, Phone: 860-747-6333 / Toll Free 1-800-BUY-MOTT / E-Mail: or visit our website at
Print | 
Email |  Comment   Share  
Contacts: View detailed contact information.


Post a comment about this story

(your e-mail address will not be posted)
Comment title:
To submit comment, enter the security code shown below and press 'Post Comment'.

 See related product stories
More .....
 See more product news in:
Chemical Processing and Waste Management
Fluid and Gas Flow Equipment
 More New Product News from this company:
Porous All-Metal Membrane comes in various form factors.
Ultra High Purity Gas Filters target semiconductor facilities.
All-Metal Filters handle low vapor pressure gases.
Porous Metals target alternative energy applications.
Porous Components/Filters are offered in refractory metals.
More ....
| Featured Manufacturing Jobs
 Other News from this company:
Mott Exhibits All-Metal Medical Components at BIOMEDevice Show in Boston
Mott Exhibits Sintered Porous Metal Products for Biopharmaceutical Processes
Mott Porous Metal Filtration Used in Methanol to Olefins Conversion
Mott Corporation Now ASME NQA-1 Compliant
Mott Porous Metal Products for Bioreactors and Fermentors Displayed at Interphex 2008
More ....
 Tools for you
Watch Company 
View Company Profile
More news from this company
E-mail this story to a friend
Save Story
Search for suppliers of
Gas Filters
Metal Filters
Join the forum discussion at:
Tools of the Trade

Home  |  My ThomasNet News®  |  Industry Market Trends®  |  Submit Release  |  Advertise  |  Contact News  |  About Us
Brought to you by        Browse ThomasNet Directory

Copyright © 2014 Thomas Publishing Company. All Rights Reserved.
Terms of Use - Privacy Policy

Error close

Please enter a valid email address