Heaters suit semiconductor and manufacturing processes.
December 6, 2006 -
With integrated temperature controller and insulated silicone heater mat, Series 48 Heaters feature re-settable high temperature safety limit device that meets ULŪ 1998 and CE 60730 requirements. Units provide dedicated mechanical relay output for high-low temperature alert, no-arc relay for power switching, LEDs for local alarm indication, and field programmable set points for adjustable temperature control.
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Original Press release
MKS
Six Shattuck Rd., Dept. T
Andover, MA, 01810 2449
USA
MKS Introduces Series 48 Heaters
Integrated Temperature Controller Provides Versatility, Functionality
Wilmington, MA, November 16, 2006 - MKS Instruments, Inc. (Nasdaq: MKSI), a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, has introduced the Series 48 Heaters for semiconductor, biopharmaceutical, custom and R&D applications. Featuring an integrated temperature controller, user-friendly communication and display modules, insulated silicone heater mat, and enhanced safety elements, Series 48 Heaters provide more accurate temperature control and greater thermal uniformity for decreased tool downtime.
The new control mechanism features a re-settable high temperature safety limit device that meets ULŪ 1998 and CE 60730 requirements. It eliminates the need for a thermal fuse and allows for easy reset after an over-temperature event, greatly reducing downtime potential. The Series 48 controller also provides dedicated mechanical relay output for high-low temperature alert, a no-arc relay for power switching, LEDs for local alarm indication and field programmable set points for adjustable temperature control. The optional display and communications upgrade modules can be easily installed in the field to provide a digital display, user adjustable control parameters, RS485 MODBUS communications and other interface features.
The Series 48 Heaters' control components are located inside the controller away from heat sources, extending the heater life. Silicone foam insulation bonded to the reinforced silicone heater mat results in external heater surfaces that are safe to touch and meet OSHA requirements. Additional features include a computer software interface for simplified heater control. Custom temperature control pre-sets are also available.
About MKS
MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for biopharmaceutical and medical imaging equipment.
Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital.
Corporate contact:
Lisa Condon
Phone: 978-284-4050
Fax: 978-284-4999
Lisa_Condon@mksinst.com
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