Gas Abatement Systems target semiconductor manufacturers.April 5, 2007 -
Equipped with 1-6 inlets, ATLAS(TM) Abatement Systems combine combustion abatement and wet scrubbing stages for optimal powder handling and immunity to corrosion. They offer temperature management system, flow capacity up to 600 slm, and color touch-screen display that facilitates operation and maintenance. ATLAS TCS addresses common CVD gases, while ATLAS TPU addresses PFC gases in CVD and etch processes, and ATLAS Kronis addresses low-k CVD gases in next-generation processes.
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Original Press release
Edwards Vacuum Technology
301 Ballardvale St.
Wilmington, MA, 01887
USA
BOC Edwards Announces New ATLAS(TM) Abatement Systems
ATLAS(TM) is a new range of combustion abatement solutions that offer semiconductor manufacturers reduced operating costs and enhanced ease of use
SHANGHAI, CHINA (20 March 2007)-BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today the new family of ATLAS(TM) gas abatement solutions for semiconductor manufacturers. The ATLAS systems meet the industry's need for three process-related abatement problems: ATLAS TCS addresses the common CVD gases, ATLAS TPU addresses PFC gases in CVD and etch processes, and ATLAS Kronis addresses the low-k CVD gases in next-generation processes. The ATLAS systems will be showcased at SEMICON® China 2007, March 21-23, 2007, at the Shanghai New International Expo Centre in Shanghai, (Booth 4509).
The new ATLAS system consumes half the fuel of previous-generation gas abatement systems, significantly reducing running costs. It features one to six inlets with a number of options, including a temperature management system, and a flow capacity of up to 600slm. It also offers enhanced ease-of-use and is more efficient to maintain.
"The ATLAS system is based on the previous-generation technology that customers worldwide have come to trust for performance, reliability, and safety; yet the ATLAS system offers improvements in operating costs, maintenance requirements and ease of use," said Jerome Boegner, exhaust gas management product manager (Asia), BOC Edwards. "We've taken 12 years of field experience with the TCS, TPU, and Kronis products and have improved them with the family of new ATLAS systems."
The new ATLAS system retains the same inward-firing Alzeta combustor technology as previous-generation gas abatement products; however the layout has been redesigned to give maintenance engineers easier access. A large, color touch-screen display has also been added, further contributing to ease of use and maintenance of the ATLAS abatement systems. A combination of field-proven combustion abatement and wet scrubbing stages provide exceptional abatement performance, excellent powder handling and immunity to corrosion.
About BOC Edwards
BOC Edwards is a leading supplier of integrated solutions for the manufacture of
microelectronics devices, including semiconductors and flat panel displays. It is
also a world leader in vacuum technology for industrial, scientific, process, and
R&D applications. BOC Edwards employs around 4,000 people globally, in the design, manufacture and support of high technology vacuum equipment. BOC Edwards invented the concept of the commercial oil-free 'dry' vacuum pump and now supplements this with a wide range of other pumping technologies as well as related products and services.
Specific information on BOC Edwards can be found at www.bocedwards.com.
E-mail inquiries can be sent to info@bocedwards.com.
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