Fabrication Monitoring Software identifies faults and solutions.June 15, 2010 -
Combining multivariate techniques with semiconductor fault detection and classification (FDC), FabStat v12 seamlessly integrates into existing fab data management system to enable monitoring of entire production. Stand-alone application instantly identifies out-of-control tool and points to leading culprit signals when fault occurs. Able to handle hierarchical, PLS, and PLS-DA models, solution interfaces to data collection system and SPC system.
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Original Press release
Umetrics Inc
17 Kiel Avenue
New Jersey, NJ, 07405
USA
Umetrics Announces the Release of FabStat Version 12
FabStat Real-Time Monitoring, Prediction and Fault Detection in Semiconductor
Malmö, Sweden, - Umetrics announces the release of version 12 of FabStat. Combining world-class multivariate techniques with semiconductor FDC know-how, Umetrics provides FabStat based on SIMCA-P+ multivariate platform. From the fab floor to the corner office, FabStat delivers real-time FDC capability and integrates into existing data collection infrastructure.
Everyone responsible for Fab production knows that proper tool monitoring and fault detection is crucial.
FabStat is a stand-alone application designed to seamlessly integrate into your existing fab data management system. With FabStat you monitor the entire production line - each tool, wafer by wafer. When a fault occurs, FabStat instantly identifies the out-of-control tool, and points to the leading culprit signals. FabStat reduces your downtime by quickly identifying faults, their cause, and their solution.
FabStat is a fully executable stand-alone product with interfaces to the data collection system and the SPC system. FabStat has a built in interface for widely used data collection systems. Its interface is easily modified to integrate with almost all silicon wafer data systems, from the first generation to the latest 300 mm tools.
FabStat version 12 has the following news
Handles hierarchical models
Supports PLS models
Supports PLS-DA models
Improved log messages
About Umetrics
Umetrics is a world leader in multivariate technology, providing software for design of experiments (DOE) and multivariate data analysis (MVA). Umetrics offers complete solutions for both off-line and on-line data analysis (continuous and batch processes), all supported by training and consulting services. Umetrics is a subsidiary of MKS Instruments, Inc. (NASDAQ: MKSI), a worldwide provider of monitoring and control technologies.
More information can be found at Umetrics web page www.umetrics.com.
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