FT-IR Metrology System meets cleanliness standards.
July 30, 2007 -
Offered as complete lab-to-FAB solution, ECO 3500 incorporates Spartan® equipment front-end solution as well as spectrometer and analytical software. It is designed for seamless integration into automated wafer handling facilities and includes dual end-effector configuration with two 300 mm in-line load ports as well as precision edge grip stage. Software interface provides full SEMI E95-compliant access for process engineering, research, and production monitoring applications.
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Original Press release
Thermo Fisher Scientific
81 Wyman Street
Waltham, MA, 02454
USA
Thermo Fisher Scientific Launches Next Generation 300mm FT-IR Metrology Tool Featuring the Highest Cleanliness Standards for Mini-Environments
MADISON, WI (July 16, 2007) - Thermo Fisher Scientific Inc., the world leader in serving science, announces the introduction of its latest FT-IR metrology system, the Thermo Scientific ECO 3500. Incorporating a unique Spartan® equipment front-end solution from Asyst Technologies Inc., a leading supplier of integrated automation systems that enhance semiconductor manufacturing productivity, the ECO 3500 benefits from the highest industry standards of cleanliness in microenvironments. Also featuring a proven spectrometer and enhanced analytical software, the ECO 3500 is designed for seamless integration into automated wafer handling facilities. The new ECO 3500 FT-IR metrology tool will be showcased on the Thermo Scientific booth #1806, South Hall at Semicon West 2007, Moscone Center, San Francisco, California, July 16-20.
The ECO 3500 is a complete lab-to-FAB solution. An enhanced software interface provides full SEMI E95 compliant access for process engineering, research and production monitoring applications. Improved wafer handling capabilities include two in-line load ports and a new high precision edge grip stage that brings an even higher degree of accuracy and repeatability to the product line. The ECO 3500 is the only FT-IR metrology tool to utilize Asyst Technologies' new, state of the art EFEM rated ISO class 1 for particle contamination, exceptional operational speed and simplified mechanical design. The unique dual end-effector configuration with two 300mm in-line load ports speed up the wafer transfer process between the FOUP (front opening unified pod) and the wafer stage and optimizes sample throughput.
Installation of the Thermo Scientific ECO 3500 is much improved with an air-cooled infrared source in place of the conventional use of cooling water. Reliability is enhanced through the use of a KBr Beamsplitter mounted in a purged housing. The ECO 3500 is capable of undertaking a wide range of chemical analyses including ppm level measurement of carbon and oxygen in silicon, weight percent level measurement of dielectric films such as boron or phosphorus in BPSG (borophosphosilicate glass) and compositional analysis of hydrogen in silicon nitride and oxy-nitride films. The spectrometer is also suitable for several key dimensional measurements such as epitaxial film thickness and SOI or MEMS thickness.
For more information on the Thermo Scientific ECO 3500 FT-IR metrology tool, please visit booth #1806, South Hall at Semicon West 2007 in San Francisco. Alternatively, please call +1 800-532-4752, email analyze@thermofisher.com or visit www.thermo.com/semiconductor.
Thermo Scientific is part of Thermo Fisher Scientific, the world leader in serving science.
About Thermo Fisher Scientific
Thermo Fisher Scientific Inc. (NYSE: TMO) is the world leader in serving science, enabling our customers to make the world healthier, cleaner and safer. With an annual revenue rate of more than $9 billion, we employ 30,000 people and serve over 350,000 customers within pharmaceutical and biotech companies, hospitals and clinical diagnostic labs, universities, research institutions and government agencies, as well as environmental and industrial process control settings. Serving customers through two premier brands, Thermo Scientific and Fisher Scientific, we help solve analytical challenges from routine testing to complex research and discovery. Thermo Scientific offers customers a complete range of high-end analytical instruments as well as laboratory equipment, software, services, consumables and reagents to enable integrated laboratory workflow solutions. Fisher Scientific provides a complete portfolio of laboratory equipment, chemicals, supplies and services used in healthcare, scientific research, safety and education. Together, we offer the most convenient purchasing options to customers and continuously advance our technologies to accelerate the pace of scientific discovery, enhance value for customers and fuel growth for shareholders and employees alike. Visit www.thermofisher.com.
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