Excimer Lasers provide beam homogeneity.
December 8, 2004 - Offering pulse-to-pulse stability, COMPexProâ„¢ UV lasers are offered with fluorine gas or chlorine gas plasma tubes. Ceramic preionization discharge results in smooth beam profile and stable pulse energies while also preventing build-up of tube contaminants. Lasers deliver energies up to 700 mJ for 248 nm and pulse repetition rates from single-shot up to 100 Hz, and are intended for scientific, medical, and industrial uses requiring medium duty cycles.
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Original Press release
Lambda Physik USA, Inc.
3201 W. Commercial Blvd., Suite 110
Fort Lauderdale, FL, 33309
USA
New Excimer Lasers Deliver Unmatched Pulse-to-Pulse Stability
The new COMPexProâ„¢ series of excimer lasers from Lambda Physik provide increased beam homogeneity and an unprecedented level of pulse-to-pulse stability. Replacing the previous COMPex series, the COMPexPro family of pulsed ultraviolet lasers has been designed to deliver the longest gas fill lifetime and tube lifetime of any laser in this operation range.
COMPexPro is offered with a choice of gas-specific optimized plasma tubes (fluorine gas or chlorine gas version). Lambda Physik is the first excimer manufacturer to provide these gas-specific tubes—an innovation known to deliver approximately a 10% boost in laser pulse energy. The COMPexPro tube utilizes the smooth ceramic discharge technology originally developed by Lambda Physik for high-pulse energy, mass production excimer lasers. This patented ceramic preionization discharge results in the smoothest possible beam profile and yields extraordinarily stable pulse energies; plus, it prevents the build-up of tube contaminants. As a consequence, with this unique ceramic preionization, extended tube lifetimes (typ. 1.5 billion pulses), as well as gas and optics lifetimes (typ. 25 million pulses at 248 nm), are achieved.
COMPexPro lasers can operate at all excimer output wavelengths throughout the UV and deep-UV ranges. These lasers deliver energies up to 700 mJ for 248 nm and pulse repetition rates from single-shot up to 100 Hz. Even at low (<5 Hz) pulse repetition rates without active pulse-to-pulse energy stabilization, the overall pulse energy stability at 248 nm is typically an outstanding 0.5% (1 sigma).
COMPexPro excimer lasers feature a small footprint and are intended for demanding scientific, medical and industrial uses requiring medium duty cycles. COMPexPro is the most precise ablation laser for pulsed laser deposition (PLD) and laser-assisted inductively coupled mass spectrometry (LA-ICP-MS). Other applications include drilling, marking and dye laser pumping.
Lambda Physik is a worldwide technology leader for pulsed UV and tunable laser sources for lithography, industrial, scientific and medical applications.
For more information, contact your local Sales Representative at 1-800-EXCIMER or visit our website at www.lambdaphysik.com.
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