Excimer Laser incorporates output stabilization features.
April 14, 2010 -
Offering 2 kHz repetition rate for increased throughput, fully Semi S2-certified IndyStar 2 kHz is offered with 193 nm output for 8 W of stabilized power or 248 nm output for 12 W. Integral electronics platform enables POWERLOK and TIMELOK stabilization features, which respectively ensure constant pulse energy of each single laser pulse and provide trigger-to-pulse delay stability. Uses include semiconductor fabrication, testing, inspection, and micromaterials processing facilities.
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Original Press release
Coherent Inc., Laser Group
5100 Patrick Henry Dr.
Santa Clara, CA, 95054-1112
USA
Coherent Releases Excimer Laser IndyStar with 2 kHz
Santa Clara, Calif. - Coherent Inc. (Santa Clara, CA) (Nasdaq: COHR) has added a new model to their popular IndyStar family of compact excimer lasers that offers higher repetition rate (2 kHz) for increased throughput. In addition, the fully Semi S2-certified IndyStar 2 kHz laser incorporates several new output stabilization features for improved processing; making them ideal for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. The new IndyStar 2 kHz is offered with a choice of 193 nm (ArF) output where it delivers 8 Watts of stabilized power, or 248 nm (KrF) output with 12 Watts of stabilized power.
The new IndyStar uses an advanced electronics platform enabling two important new stabilization features called POWERLOK and TIMELOK. The POWERLOK feature ensures constant pulse energy of each single laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. TIMELOK provides superior trigger-to-pulse delay stability, supporting tight synchronization with other equipment. Plus all IndyStar lasers continue to offer the lowest cost of ownership, in large part because of their use of field-proven ALMETA (All-Metal-Ceramic) tube technology which delivers high reliability and long lifetime. With 193 nm operation, the new IndyStar 2 kHz shows a tube/optics lifetime exceeding 10 billion laser pulses which translates into hands-free operation of more than one year.
The IndyStar 2 kHz delivers faster and better results for semiconductor applications such as photomask inspection and testing photolithography optics. It also enables other high speed processes including precision material ablation tasks and high-value marking applications.
Founded in 1966, Coherent, Inc. is a Russell 2000 Index company and a world leader in providing laser-based solutions to the commercial and scientific research markets. Please direct any questions to Hans-Gerd Esser, product line manager, +49 551 6938 344. For more information about Coherent, including product and financial updates, visit our website at http://www.Coherent.com.
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