Encoder Products utilize laser interferometry.
November 16, 2001 - NanoGrid Model A has electronic interpolation to 0.3 Nm on ISA-bus compatible PC board with either 32-bit digital position word or optional A-quad-B format output. It delivers repeatability of better than ±5 Nm and has high speed capability of 700 Nm/sec. Model B produces selectable A-quad-B outputs to 20 Nm resolution using ASICs on small printed circuit board, with speed capability up to 1.4 m/sec. Both have variety of grid sizes up to 400 mm sq.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Optra Inc.
461 Boston St.
Topsfield, MA, 01983
USA
OPTRA Announces Ultra-Precise NonoGrid Encoder Solutions
OPTRA, Inc. announced its NanoGrid(TM) interferometric encoder products to attack industry requirements for high precision XY measurements in production environments. These tools represent a major advance for semiconductor wafer position and motion control and are also available to calibrate and control high precision mechanical machining processes. The new OPTRA products capture the accuracy of the best direct-write lithography machines, using laser interferometry in a highly controlled environment, and embody it in a stable XY grid. Grid technology does not exhibit the turbulence-induced errors associated with laser interferometers in production environments - and they cost less. NanoGrid produces an orthogonal repeatable reference that can be placed close to the desired measurement point. This feature can greatly reduce Abbe and stage errors frequently associated with separate linear scale encoders and stacked stages.
The NanoGrid product line is available in two series, NanoGrid Model A has electronic interpolation to 0.3 nanometer on an ISA-bus compatible PC board with either a 32-bit digital position word or optional A-quad-B format output. Model A delivers repeatability of better than ±5 nanometers and has high speed capability of 700 mm/sec. NanoGrid Model B produces selectable A-quad-B outputs to 20 nanometer resolution using high performance ASICs on a small printed circuit board, with speed capability up to 1.4 meters/sec. Either product can be purchased with a variety of active area grid sizes up to 400 mm square.
OPTRA, Inc. is a leading supplier of ultra precision measurement solutions using state-of-the-art electro-optic technology. The company markets NanoGrid and NanoScaleTM, the world's highest
resolution grid and linear encoder products. Nano technology-based solutions are now being supplied to the semiconductor equipment, mechanical machine tool and storage technology
markets. OPTRA has a unique history of winning leading-edge technology development contracts for commercial and government related research. OPTRA manufactures products, and also licenses certain technology, which have originated from its development work.
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