Electrostatic Voltmeter measures semiconductor wafer surface.November 28, 2001 - Model 323 uses vacuum-compatible sensors, such as side view, end view, round or square body probes, to perform surface voltage measurements. It has 3-1/2 digit LED display and analog outputs at various scale factors. Analog outputs can be used to control ionization system for measured surface discharging. Applications include measuring semiconductor wafers, surface work functions, and disk drive assembly charge accumulation measurements.
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Original Press release
Trek, Inc.
3932 Salt Works Rd., P.O. Box 728
Medina, NY, 14103 0728
USA
Trek, Inc. Features Its Semiconductor Wafer Electrostatic Voltmeter
The TREK Model 323 Electrostatic Voltmeter performs high voltage resolution, noncontacting, D.C. stable surface voltage measurements using a technique which maintains high measurement accuracy over a wide range of sensor probe to measured surface spacings. This makes the TREK Model 323 ideal for semiconductor wafer surface voltage measurement as well as other critical applications such as surface work function measurements and disk drive assembly charge accumulation measurements.
Using a variety of user specified vacuum compatible sensor probe configurations, such as side view, end view, round or square body types, the TREK Model 323 features a 31/2 digit LED display while providing analog outputs for external monitoring at various scale factors. The analog outputs can be used to control an ionization system to enable measured surface discharging.
The TREK Model 323 employs the world renown TREK low impedance sensor probe design which assures better than 0.05% measurement accuracy in the range of 0 to ±100 volts over wide variations of temperature and humidity.
For additional information on the new TREK Model 323 Semiconductor Wafer Electrostatic Voltmeter, please visit our website at www.trekinc.com.
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