Electrostatic Voltmeter features millivolt resolution.
August 18, 2006 -
Designed for applications that require non-contacting measurement of electrostatic voltages from mV to ±40 V, Model 325 offers 1 mV sensitivity, speed response of less than 3 ms, and accuracy better than 0.05% FS. In semiconductors, unit measures surface potential of bare or processed wafers to analyze doping and thin film characteristics. In processing, Model 325 can monitor electrostatic charge where build-up of such charge can cause productivity or yield problems.
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Original Press release
Trek, Inc.
11601 Maple Ridge Rd.
Medina, NY, 14103 9710
USA
TREK Introduces Electrostatic Voltmeter with Millivolt Resolution
Model 325 ideal for applications in high-tech & semiconductor manufacturing, materials processing, materials science and R&D sectors
17 July 2006 - Medina, New York, USA: TREK, INC. announces the introduction of Model 325 Electrostatic Voltmeter, an ultra-sensitive instrument which is ideal for noncontacting electrostatic voltage measurement and monitoring in applications within high-tech, semiconductor, materials processing, materials science and R&D sectors.
This versatile instrument was specifically designed to be used in applications which require highly accurate, low noise, noncontacting measurement of electrostatic voltages from millivolts to +/- 40 V over a wide range of probe-to-surface distances.
In high-tech manufacturing, applications include electrostatic monitoring of devices sensitive to electrostatic discharge (ESD), and testing of the reliability and characteristics of dielectric materials and films in electronic applications.
In semiconductors, Model 325 is designed to measure the surface potential of bare or processed wafers to analyze doping and thin film characteristics. This new electrostatic voltmeter is also useful for measurements of polarization, residual charge, and characterization of electrostatic chucks.
In processing, Model 325 can monitor electrostatic charge where the build-up of such charge can cause productivity or yield problems, as in high-end processing of paper, plastic, textile or other film products.
In materials science and R&D, applications include contact potential (surface work function) determination, materials evaluation and electret studies.
Features of Model 325 include sensitivity of 1 mV, speed of response less than 3 ms, and accuracy better than 0.05% of full scale. TREK's patented low impedance probe sensor assures measurement accuracy which is essentially independent of probe-to-test-surface spacing while eliminating the external environmental effects of high humidity and contamination on measurement accuracy. Contaminants include airborne dust, ions, chemicals and other particulates.
Model 325 Electrostatic Voltmeter offers a higher performance alternative to the company's Model 320C Electrostatic Voltmeter. While Model 320C measures to a higher voltage range (+/- 100 V), Model 325 offers faster speed of response, lower noise and higher accuracy. The new model's smaller probe also increases the unit's utility in space-constrained environments. The Model 325 was designed to address the ever-more-demanding semiconductor parameters for permittivity, oxide thickness and integrity, contact potentials and higher-speed automated voltage profile scanning.
Special features of the Model 325 allow tuning the performance of the unit to compensate for specific test conditions. Model 325 can be operated as a bench top unit or in a standard rack (with optional hardware).
Standard unit pricing in the USA for Model 325 is in the range of $3,000 US Funds. For details on performance specifications, customizing options or other information please contact TREK, INC. at 585-798-3140 or via sales@trekinc.com.
TREK, INC. (est. 1968) is a privately held company that designs, manufactures and sells high performance electrostatic measurement instruments, sensors & monitors, and high voltage amplifiers, power supplies & generators. Trek's products are used by OEMs involved in semiconductor manufacturing and electrophotography; in applications sensitive to electrostatic discharge (ESD); and by companies and universities involved in a wide variety of research applications, including electrostatics, electrophotography, piezoelectrics, electrohydrodynamics, and plasma chemistry. Customers include numerous Fortune 500 companies and leading universities. For more information call 585-798-3140, or go to www.trekinc.com.
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