Dissolved Ozone Analyzer monitors semiconductor processes.
June 12, 2002 -
dFFOZ(TM) Sulfuric Dissolved Ozone analyzer provides continuous, in-situ, in-line measurements in liquids over concentration range of 0 to 150 mg/L. It can operate continuously at temperatures up to 140°C in sulfuric bath, high purity semiconductor processes, and semiconductor wet bench/wet etching systems. FlareLok® fittings remain tight and won't leak. It can be installed in full-flow recirculating stream with flow rates up to 150 SLPM.
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Original Press release
IN USA, Inc.
87 Crescent Rd.
Needham, MA, 02494
USA
dFFOZ(TM) Sulfuric Dissolved Ozone Analyzer Offers Durability, Performance in Sulfuric Acid Baths
Needham, MA - The dFFOZ(TM) Sulfuric Dissolved Ozone Analyzer from IN USA, Inc. offers the durability, precision, and performance needed for ozone sensing in sulfuric acid baths as well as DI water. Capable of operating continuously at temperatures up to 140 degrees C. in a sulfuric bath, and designed with FlareLok® fittings that remain tight and won't leak, the dFFOZ(TM) (dissolved Full Flow Ozone) Sulfuric is designed for semiconductor wet bench/wet etching systems.
The dFFOZ(TM) Sulfuric provides continuous, in-situ, in-line measurement of dissolved ozone in liquids over the concentration range of 0 to 150 milligrams/liter. The dFFOZ sensor is a "smart", plug-in sensor with on-board calibration data, and incorporates IN USA's innovative, patented dual optical-path sample sensing technology to provide unparalleled performance and virtually eliminate the need for a reference gas measurement. The dFFOZ Sulfuric is "clean-ready" for high purity semiconductor processes, and can be installed in a full-flow recirculating stream, in-line at flow rates up to 150 SLPM.
IN USA, Inc. is a recognized world leader in Ozone Instrumentation and Control and offers a complete line of instruments for measurement of ozone in gas and liquid phases, including process ozone (high concentrations), ambient ozone (low concentrations), stack gas ozone (low concentrations), and dissolved ozone in water and other liquids. A typical installation consists of the Model dFFOZ Sensor, a controller (Mini-SCI or SCI-Mux), and interconnecting Teflon7-jacketed cable. The Mini-SCI controller provides powerful, microprocessor-based control, display, and backlit LCD; 0-10 VDC and 4-20 mA opto-isolated analog outputs; bi-directional digital communications; and remote AutoZero capability. The SCI-Mux multichannel controller provides all the above features and can handle up to 4 dissolved or gas-phase ozone sensors simultaneously.
IN USA, Inc. is a leading developer and supplier of advanced ozone instrumentation and control systems. IN USA, Inc. offers a complete line of instruments for ozone measurement in. air and liquid phases. For more information, visit www.inusacorp.com or contact the company at 87 Crescent Road, Needham, MA USA 02494, Tel. (800) 798-4029, Fax (781) 444-9229. Callers outside the US Tel. 001.781.444.2929.
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