Destruct System decomposes fully saturated ozone.
July 5, 2002 - TOD-O3 Thermal Ozone Destruct System destroys high concentration ozone vapors that offgas from wet bench and other semiconductor applications. It includes heat exchanger, coalescing filter, thermal cooling switch, and EMO. System is designed for mounting to ozone transfer module exhaust, and can accommodate flow rates of saturated ozone up to 20 SLPM @ 240 g/Nm³. There are no consumables required for operation.
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Original Press release
IN USA, Inc.
87 Crescent Rd.
Needham, MA, 02494
USA
TOD-O3 Thermal Ozone Destruct System Completely Destroys Fully Saturated Ozone in High Concentrations
Needham, MA - The TOD-O3 Thermal Ozone Destruct system from IN USA, Inc. efficiently destroys fully saturated, high concentration ozone vapors that offgas from the wet bench and other semiconductor applications. Corrosive, toxic ozone exhausted from ozone transfer modules can be difficult to scrub and destroy in a saturated state. Ozone should not be discharged to a facility's general exhaust system, since it can degrade the
system over time and result in costly repair and replacement. The TOD-O3 decomposes fully saturated ozone to safe levels through thermal destruction of Ozone to Oxygen. The TOD-O3 is designed for mounting to an ozone transfer module exhaust.
The TOD-O3 can accommodate flow rates of saturated ozone up to 20 SLPM @ 240 grams/Nm³. The system is customized to handle the majority of ozone destruction requirements in semiconductor wafer manufacturing applications, but also in many other industrial processes, including ultrapure water systems. The TOD-O3 Thermal Ozone Destruct system delivers improved performance, maximum lifetime and reduced costs. It is designed to meet the most stringent safety requirements. Additionally, the TOD-O3 is a 'total system' that includes a heat exchanger, coalescing filter, thermal cooling switch, and EMO. The system is compact, and there are no consumables required for operation.
IN USA, Inc. is a leading developer and supplier of advanced ozone instrumentation and control systems. IN USA, Inc. offers a complete line of instruments for ozone measurement in air and liquid phases. For more information, visit www.inusacorp.com or
contact the company at 87 Crescent Road, Needham, MA USA 02494, Tel. (800) 798-4029, Fax (781) 444-9229. Callers outside the US, Tel. 001.781.444.2929.
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