Compact Vacuum Valve is rated for 10,000,000 cycles.
July 21, 2010 -
Available in angle, inline, and internal-only configurations, High Cycle Valve features stainless steel bellows that prevent outgassing, virtual leaks, and particle entrapment. High flow port sizes include NW25, NW40, and NW50, while TIG fusion welded vacuum grade body ensures less contamination build-up. For leak tight operation, elastomer seals are available in Viton® for typical operating conditions, or Kalrez® or Chemraz® for high temperature conditions and chemical resistance.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
MKS
Six Shattuck Rd., Dept. T
Andover, MA, 01810 2449
USA
MKS Introduces the High Cycle Valve
A compact valve designed for long life in demanding applications
Andover, MA, - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the High Cycle Valve, a small, light and durable vacuum valve for demanding applications where the cycle life is critical. Rated for 10,000,000 cycles, the compact valve greatly increases system uptime and minimizes maintenance costs. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, ensuring easy maintenance and extending the cycle life of the valve.
The High Cycle Valve is available in angle, inline and internal-only configurations, for ease of integration into new tool designs. High flow port sizes, including NW25, NW40 and NW50, use maximum internal diameters for greater conductance. Internal configurations can be used to integrate directly into the product, such as a load lock chamber, reducing the footprint of new tools. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.
The High Cycle Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance.
About MKS:
MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.
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