Compact Laser Displacement Sensor delivers 1 nm resolution.
June 15, 2011 -
Suited for semiconductor HDD and web processing industries, SI-F1000 Series Micro-Head Spectral-Interference Laser Displacement Sensor provides precision performance from 2 mm dia sensor head. It delivers laboratory accuracy measurements inside production process as well as assembled products. Optical system uses fiber optic detecting, enabling precision measurements to be taken without introducing electromagnetic effects or adding another head to measurement system.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Keyence Corporation of America
669 River Dr., Suite 403
Elmwood Park, NJ, 07407
USA
1nm Resolution out of a 2mm Sensor
Keyence's revolutionary, Micro-Head Spectral-Interference, method together with thirty five years of measurement know-how results in a revolutionary new metrology tool. The Keyence SI-F1000 Series Micro-Head Spectral-Interference Laser Displacement Sensor is designed to provide high precision performance packed into a space saving 2mm diameter sensor head. This revolutionary design is designed to provide laboratory accuracy measurements inside the production process and even inside assembled products.
The fiber-optic sensor heads were designed from the ground up for optimum flexibility. Because the SI-F1000 is a low power optical system using fiber optic detecting, high precision measurements can be taken without introducing electromagnetic effects or additional head to the measurement system. This means that not only can you be confident in the measurement output, but the system can also be installed in environments that defeat the implementations of conventional capacitance based sensors.
When these heads are combined with Keyence's cutting edge digital controllers, implementation has never been easier. Not only is external signal processing completely eliminated, but all controller models include built in digital and analog data outputs. In addition, extensive onboard data storage and calculation functions make even the most complicated measurement regimes easy to implement with a few clicks of the SI-Navigator configuration software.
Typical SI-F1000 applications include:
Semiconductor Industry: Wafer thickness and warpage mapping.
Hard Disk Drive Industry: Media thickness and surface characterization.
Web Processing: In line thickness measurement of transparent webs and coatings.
For SI-F1000 specifications and applications, please visit: www.keyence.com/PRSI
For further product information, contact Bob Hosler, National Product Sales Director, Keyence Corporation of America, 1100 N Arlington Heights Rd, Suite 350, Itasca, IL 60143.
Tel: 1-888-539-3623 ext 80312, Fax: 201-930-1883 Email: BobH@Keyence.com
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