Beam Delivery System suits material processing research.
December 17, 2003 -
Microtech UV laser beam delivery and microscope camera system mounts on standard optical breadboard. It includes on-target process viewing with zoom control and beam homogenizer for intensity profile control. Demagnification of laser imaging system is continuously variable from 4-20 x. Variable laser image magnification can be fine-tuned for exact mask overlay. Modular, tabletop unit is suited for lithography, 3-D micromachining, drilling, cutting, and marking applications.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
JP Sercel Associates, Inc.
220 Hackett Hill Rd.
Manchester, NH, 03102
USA
New Microtech Beam Delivery System for UV Lasers Delivers Big-System Performance at Affordable Price for Researchers
Hollis, New Hampshire, USA -- JPSA Laser's new Microtech modular tabletop Beam Delivery (MBD) system is a low cost, yet full featured, compact UV laser beam delivery and microscope camera system designed for materials processing research. The MBD system is a flexible beam delivery platform designed to mount on a standard optical breadboard, an affordable and portable tool for applications such as lithography, selective material removal, 3-D micromachining, high precision drilling, cutting, marking, and surface scanning.
The Microtech MBD system offers all the features, precision, and high performance of larger, more complex and costly systems, but at a fraction of the cost and with added portability. The unique design of the MBD flexible platform plus the technically-advanced design of the cameras, laser, and optical table allow the user to achieve professional, repeatable, high precision results quickly and easily.
Additional features and advantages of the MBD system include high precision optomechanics for exact repeatability; on-target process viewing with zoom control; continuously variable demagnification and on-target fluence; .4X to 20X demagnification and micron resolution optics; and a beam homogenizer for intensity profile control, among others.
The input beam height of the MBD system matches most commercial excimer lasers, and it can easily be adjusted. On-target vision capability expedites focusing and provides a high quality visual image, zoomable for micro and macro viewing. Variable laser image magnification can be fine-tuned for exact mask overlay. Variable laser fIuence fine adjustment provides the finesse required for difficult and high precision tasks. A wide range of options is available with the MBD system.
Standard features of the Microtech MBD system include the following:
o Rugged support structure which mounts to a standard optical bench;
o Ontarget process camera with parfocal zoom to 180x on screen;
o Off-line inspection camera with parfocal zoom to 1000x on screen and 1 micron resolution;
o Demagnification of laser imaging system is continuously variable from 4x to 20x;
o All necessary beam tubes mirror mounts and mirrors;
o Singlet laser lens kit;
o Removable mask premount.
Base price for the MBD for a KrF laser is $25K (USD) The base system includes an on target camera, a variable attenuator, variable magnification, Z axis crossed roller stage with course and fine focusing adjustment and mask set field lens and high performance doublet objective for better than 5 micron on axis spots. The base system can adapt to up to three different lasers with a simple mirror change routine. Delivery time is approximately 8 weeks. Other optional components, such as motion control, air-bearing stages, additional stages of motion, specially coated optics, additional beam delivery components (such as fly eye homogenizers, motorized mask changers and variable attenuators) can add significantly to the final cost, and increase the delivery time to as much as 12 weeks.
JPSA products and services include excimer and UV - DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop and an applications laboratory, as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835. E-mail: jsercel@jpsalaser.com.
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