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FIB/SEM Systems are designed for semiconductor labs.

December 14, 2006 - NanoLab(TM) 400/400S feature high resolution field emission scanning electron microscope column combined with Sidewinder(TM) focused ion beam column and gas chemistries. Suited for sub-65 nm node devices, DualBeams(TM) systems offer low-kV SEM resolution to support 3D cross-sectional imaging and analysis. NanoLab 400 comes with high resolution stage/load lock, while Model 400S is equipped with flip stage for precise sample localization to bridge SEM-TEM gap.

Related categories: Laboratory and Research Supplies and Equipment | Optics and Photonics | Vision Systems

Archive Press Release
(Products mentioned in this Archive Press Release may or may not be available from the manufacturer.)

Release date: November 30, 2006

FEI Expands Helios NanoLab(TM) Family for Semi Market

NanoLab 400/400S to be Introduced at SEMICON Japan Giving Users a Complete Range of Advanced Solutions for Semiconductor Labs

HILLSBORO, Ore., Nov. 30 -- FEI Company (NASDAQ:FEIC) will expand its top-of-the-line Helios NanoLab(TM) family of DualBeams(TM) when it introduces the Helios NanoLab 400 and 400S systems next week at SEMICON Japan. Combining advanced focused ion beam (FIB) and scanning electron microscope (SEM) technologies in a highly-integrated and easy-to-use platform, the Helios NanoLab family of tools will provide semiconductor manufacturers with a complete range of advanced high-resolution solutions for their analytical labs.

The Helios NanoLab family represents the next-generation of technology following the success of FEI's popular Strata(TM) 400 and 400 STEM (scanning/transmission electron microscope) in the semiconductor market. As with all FEI products for semiconductor manufacturers, the new Helios NanoLab systems are designed to help semiconductor companies move through their design and process ramps quickly and with more efficiency, enabling them to move new products to market faster.

The Helios NanoLab family features a new ultra-high resolution field emission SEM column combined with FEI's widely acclaimed Sidewinder(TM) FIB column and gas chemistries to provide up to 40 percent improvement in imaging resolution compared to previous DualBeam systems. These systems feature greatly enhanced low-kV SEM resolution to support cross-sectional imaging and analysis and advanced STEM applications for devices featuring new materials and sub-65 nm design nodes. They also provide enhanced stability and optimized operation within a wide range of parameters.

The Helios NanoLab 400 offers an advanced high resolution stage and load lock and the 400S is equipped with a flip stage for highly precise sample localization to bridge the SEM-TEM gap. The 600 system, introduced earlier this year, offers a larger stage for versatile sample handling.

"From high volume 3D cross-sectional imaging and analysis to advanced high-resolution STEM imaging, the Helios NanoLab family offers solutions to meet the rigorous demands of semiconductor labs," said Tony Edwards, vice president and general manager of FEI's NanoElectronics business. "The Helios NanoLab systems represent FEI's continued lead in innovating combined FIB/SEM solutions. This new DualBeam will allow users to achieve ground-breaking results in multiple applications for advanced process nodes with accuracy and repeatability."

FEI delivers a complete range of market-leading FIB, FIB/SEM, S/TEM and TEM solutions designed to meet the challenges of today's semiconductor manufacturers. Together, the Helios NanoLab and the Titan S/TEM-the world's most powerful commercially-available microscope--represent a powerful and compelling tool set for a range of applications.

About FEI

FEI is a global leader in providing innovative instruments for nanoscale imaging, analysis and prototyping. FEI focuses on delivering solutions that provide groundbreaking results and accelerate research, development and manufacturing cycles for its customers in Semiconductor and Data Storage, Academic and Industrial R&D, and Life Sciences markets. With R&D centers in North America, Europe, and India, and sales and service operations in more than 50 countries around the world, FEI's Tools for Nanotech(TM) are bringing the nanoscale within the grasp of leading researchers and manufacturers. More information can be found online at: www.fei.com.

Source: FEI Company

Dan Zenka,
APR,
Global Public Relations, FEI Company
+1-503-726-2695
dzenka@feico.com

Web site: http://www.feicompany.com/

Contacts:

Marketing:
Global Public Relations
Dan Zenka APR
USA
Phone: 503-726-2695

E-mail this person

Company Information:
Name: FEI Company
Address: 5350 NE Dawson Creek Dr.
City: Hillsboro
State: OR
ZIP: 97124
Country: USA
Phone: 503-726-7500
FAX: 503-726-7509
http://www.feicompany.com

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