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Water Sanitization System suits biopharmaceutical uses.
Water Sanitization System suits biopharmaceutical uses.

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Water Sanitization System suits biopharmaceutical uses.


February 17, 2009 - Offering alternative to chemical water treatment systems, LIQUOZON® Ultra generates ozone, dissolves it into water, and delivers degassed ozone-enriched water, making it suited for DI water loops, storage tanks, and distribution lines. Skid-mounted purified water system handles flows up to 50 gpm with minimum pressure drop. It is equipped with flow rate and ozone concentration controllers, ozone safety monitors, control panel with recorder to monitor quality, and optional TOC meter.

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MKS Introduces the LIQUOZON® Ultra Purified Water Sanitization System for Biopharmaceutical Applications at INTERPHEX 2009


Wilmington, MA, January 8, 2009 -MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the LIQUOZON® Ultra, a clean, safe and efficient water sanitization alternative to chemical water treatment systems in pharmaceutical applications. The LIQUOZON® Ultra automated ozone injection system for DI water loops, storage tanks and distribution lines will be showcased at INTERPHEX 2009. It generates ozone, dissolves it into water and delivers degassed ozone-enriched water, providing a cost-effective substitute to chlorine and heat.

LIQUOZON® Ultra is a compact, skid-mounted purified water system for UPW and UHPW. It is capable of handling flows up to 50 GPM with minimum pressure drop. The system is equipped with flow rate and Ozone concentration controllers, ozone safety monitors, a control panel with a recorder to monitor quality, and an optional TOC meter. Safety features include alarm signals for high/low concentration, temperature of the ozone gas thermal destruct unit and ozone leakage.

The LIQUOZON® Ultra generates ozone using Silent Discharge. It injects the ozone into DI water then degasses the ozone-enriched water and delivers it to the storage tank and delivery loop. UV light is used to photo-dissociate ozone, reducing it back to oxygen.

For more information:

Contact MKS Instruments

or call 978-645-5500

About MKS

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, and energy generation and environmental monitoring.

Company Information:
Name: MKS
Address: Six Shattuck Rd., Dept. T
City: Andover
State: MA
ZIP: 01810 2449
Country: USA
Phone: 978-975-2350
FAX: 978-975-0093
http://www.mksinst.com


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Samsung SDI Chooses LIQUOZON® Dissolved Ozone System for OLED Manufacturing
AVL, MKS Announce OEM Agreement MKS Multigas 2030HS® FTIR to Be Integrated into AVL SESAM-FTIR System
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