January 6, 2009 -
Monolithically integrated 11-megapixel micro-mirror array occupies 10 cm² footprint and is built using SiGe-based MEMS platform. Each mirror in array measures 8 x 8 µm and can be individually tilted by high-speed, integrated CMOS circuitry underneath array. Fabricated on top of foundry high-voltage 0.18 µm CMOS 200 mm wafers with 6 interconnect levels, mirrors show no creep and meet 1012 power cycles mechanical lifetime.
IMEC Builds Reliable 11-Megapixel Micro-Mirror Array for High-End Industrial Applications
IEDM CONFERENCE - SAN FRANCISCO, CALIFORNIA - December 15, 2008 - At today's IEEE International Electron Devices Meeting, IMEC presented a monolithically integrated 11-megapixel micro-mirror array for high-end industrial applications -- a world's first both in terms of pixel density and reliability. Each mirror in the array is 8µm x 8µm and can be individually tilted by the high-speed integrated CMOS circuitry underneath the array. This device fits in IMEC's CMORE initiative, which offers cost-effective solutions for continued system scaling, not by shrinking CMOS but by focusing on monolithic co-integration of heterogeneous technology.
IMEC's 10cm² 11-megapixel mirror array has a pixel density that is almost double that of comparable state-of-the-art micro-mirrors. And IMEC has demonstrated that its mirrors show no creep and meet a 10-to-the-12th-power cycles mechanical lifetime. Integrated micro-mirror arrays such as this one, are used in, for example, video projection or lithography mask writers.
IMEC fabricated the 8µm mirrors on top of foundry high-voltage 0.18µm CMOS 200mm wafers with 6 interconnect levels. The array was built using IMEC's proprietary SiGe-based MEMS platform, meeting the mirror's mechanical reliability requirements, device flatness, and compatibility with high-speed CMOS. Poly-SiGe was chosen as structural material for the mirrors, instead of Al. Poly-SiGe solves many of the reliability issues of Al-based mirrors, and it is compatible with above CMOS processing, allowing a smooth integration with the CMOS chip below.
IMEC's CMORE initiative offers cost-effective solutions for monolithic co-integration of heterogeneous technologies. The services offered range from development-on-demand, over prototyping, to low-volume production.
These services profit from the expertise in many research areas available at IMEC. The CMORE solutions are implemented in IMEC's 200mm fab with advanced packaging capabilities, such as 3D integration. The two process platforms involved are a 0.13µm CMOS process and a versatile SiGe above-IC MEMS process. On customer demand, the CMORE solution can be migrated to IMEC's 300mm fab.
Photos for this release can be downloaded at:
Picture 1: Top view of individual mirrors and hinges: http://www2.imec.be/ufc/file2/imec_si...
bb5648d8/pu/mirrors_2.bmp
Picture 2: cross-section of the integrated micro-mirror array, showing the mirrors on top of the 6 layers of interconnect: http://www2.imec.be/ufc/file2/imec_si...
7005998e/pu/mirrors_1.bmp
About IMEC
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, offices in the US, China and Taiwan, and representatives in Japan. Its staff of more than 1650 people includes more than 500 industrial residents and guest researchers. In 2007, its revenue (P&L) was EUR 244.5 million.
IMEC's More Moore research aims at semiconductor scaling towards sub-32nm nodes. With its More than Moore research, IMEC looks into technologies for nomadic embedded systems, wireless autonomous transducer solutions, biomedical electronics, photovoltaics, organic electronics and GaN power electronics.
IMEC's research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network worldwide position IMEC as a key partner for shaping technologies for future systems.
Further information on IMEC can be found at www.imec.be.
Contact:
Barbara Kalkis, Maestro Marketing & Public Relations, T : +1 408 996 9975, kkalkis@compuserve.com
Contacts:
Public Relations:
Maestro Marketing & Public Relations
Barbara Kalkis
USA
Phone: 408-996-9975 E-mail this person Company Information: Name: IMEC Address: Kapeldreef 75, B-3001 City: Leuven Country: Belgium Phone: +32 16 28 12 11 FAX: +32 16 22 94 00 http://www.imec.be
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