Compound suits high-temperature sealing applications.
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Press Release Summary:
With service temperature of -6 to 300°C, Simriz® 508 exhibits plasma resistance and minimum particulation in range of plasma environments. White perfluoroelastomer material is designed for thermal stability and nearly universal protection against chemical attack. Suited for deposition, oxide, and metal plasma etching, ashing, metallization, and ion implant, product is appropriate for chamber lid seals, bell jar seals, endpoint windows, gas inlet seals, and isolator valve seals.
Original Press Release:
Simrit to Unveil Simriz® 508 Compound at SEMICON West 2008
Latest Simriz material designed for demanding high-temperature sealing applications
SAN FRANCISCO, July 15, 2008 - To specifically address the evolving needs of the semiconductor industry, Simrit - the industrial sealing products division of Freudenberg-NOK - will debut its Simriz® 508 material during SEMICON West 2008. Simrit's new material was specifically developed for demanding, high-temperature static and dynamic sealing applications in dry chemical environments.
Simriz 508 is a white perfluoroelastomer (FFKM) material that has a service temperature range of negative six to 300 degrees Celsius and exhibits excellent plasma resistance and minimum particulation in a wide-range of plasma environments. The O-ring is a cost-effective sealing solution that offers very low trace element contamination in both wet and plasma applications.
Ideal for a variety of dry processes, including deposition, oxide and metal plasma etching, ashing, metallization, ion implant and others, the Simriz 508 material is appropriate for the following equipment locations: chamber lid seals; bell jar seals; endpoint windows; gas inlet seals; isolator valve seals; KF fittings; slit valve seals; valve seals; and window seals.
Designed for thermal stability and nearly universal protection against chemical attack, Simrit's proprietary family of Simriz FFKM compounds offers premier sealing performance. All of the Simriz compounds approach PTFE (polytetrafluoroethylene) chemical resistance and have excellent plasma resistance for dry processing. Simrit is the single-source developer of Simriz, starting with the base polymer, thus ensuring complete oversight and continuity in the compounding process, and eliminating any need for costly outsourcing.
For more information or to speak with a Simrit representative about the Simriz 508 material, visit the Simrit booth (#N6289) during SEMICON West 2008 held here from July 15 to 17.
The Simrit Division is based at Freudenberg-NOK's headquarters in Plymouth, Mich. and is part of the Freudenberg and NOK Group, which has total annual sales of more than $12 billion. Simrit offers an extensive portfolio of sealing solutions for the aerospace, appliance, diesel engine, industrial, marine, off-highway equipment, oil and gas, recreational vehicle and semiconductor markets. For more information, visit the Simrit website at www.simrit.com.
