Manifold uses dual transducers for online monitoring.
July 21, 2005 - Designed for low-flow point-of-use CMP applications, Solaris® DVP Dual Transducer Manifold uses disposable methods of reducing defect-causing particles, gels, and agglomerates while simultaneously allowing critical working particles to pass through and reach wafer. It offers clean, safe filter changeout in seconds without use of tools and integrates upstream and downstream pressure transducers for online monitoring of system and filter pressure drop to protect CMP slurries.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Manifold Specifically Designed for Optimum Gel Removal and Media-Specific Particle and Agglomerate Retention for Low-Flow Point-of-Use CMP Applications
BILLERICA, Mass., July 11 -- Mykrolis Corporation , a leading supplier of components and subsystems to the semiconductor industry, today introduced the Solaris(R) DVP Dual Transducer Manifold, the latest addition to the Solaris product line. Solaris DVP offers rapid, clean and safe filter changeout in seconds without the use of tools, limiting the handling of hazardous chemicals during installation and disposal processes. The system's advanced filtration technology provides integrated upstream and downstream pressure transducers for online monitoring of system and filter pressure drop to protect CMP slurries, thus allowing precise monitoring to prevent early or late filter changeouts. Its small footprint is designed to easily retrofit into existing tools and CMP delivery systems to lower the total cost of ownership by minimizing customization and maximizing process uptime.
"The Solaris DVP uses Mykrolis's advanced filtration technology that delivers long lasting, easy to use, disposable methods of reducing defect- causing particles, gels, and agglomerates while simultaneously allowing critical working particles to pass through and reach the wafer," said Christopher Wargo, director of the CMP business at Mykrolis.
The Solaris DVP Dual Transducer Manifold will on display at SEMICON West (Booth# 710/South Hall) in San Francisco from July 12-14, 2005.
About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit http://www.mykrolis.com/ .
Mykrolis and Solaris are registered trademarks of Mykrolis. The Mykrolis logo is a trademark of Mykrolis Corporation.Company Information: Name: Mykrolis Corp. Address: 129 Concord Rd. City: Billerica State: MA ZIP: 01821 Country: USA Phone: 978-436-6500 http://www.mykrolis.com
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