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Advertisement
X-Ray Tool detects defects in semiconductor wafers.
X-Ray Tool detects defects in semiconductor wafers.

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X-Ray Tool detects defects in semiconductor wafers.


June 2, 2005 - Digital X-ray inspection tool, BedeScanâ„¢, is used for identification and quantification of structural defects in semiconductor wafer substrates and epilayers up to 300 mm in diameter. Defect mapping tool uses non-destructive X-ray diffraction to identify anomalies in incoming and processed wafers and delivers quantitative data that enables in-line statistical control of manufacturing processes. Imaging of wafers is possible in reflection and transmission modes.

(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)

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Bede Announces BedeScanâ„¢ for Structural Defect Detection in Semiconductor Wafers

DURHAM, UK – Bede announces the BedeScan™ digital X-ray inspection tool for high-speed identification and quantification of structural defects in semiconductor wafer substrates and epilayers up to 300mm in diameter. A revolutionary defect mapping tool, BedeScan uses non-destructive X-ray diffraction (XRD) to identify a wide range of anomalies in both incoming and processed wafers, including thermal slip dislocations, edge damage, and other crystallographic defects.

BedeScan increases yield and cost savings in the semiconductor manufacturing process by identifying and quantifying defective material at early processing stages. It is ideal for high-volume manufacturing applications, delivering quantitative data that enables in-line statistical control of manufacturing processes. BedeScan offers the same crystalline defect detection as non-automated, film-based instruments traditionally confined to research and development labs.

A versatile tool, BedeScan allows for imaging of wafers in both reflection and transmission modes, providing information about crystallographic defects in the surface region and bulk of wafers. Digital image processing permits efficient measurement routines of selected regions only, avoiding unnecessary measurement of traditionally perfect areas. Its user-friendly software offers customizable speed, resolution, and scanning range.

Bede is the global leader in non-destructive X-ray metrology tools for the semiconductor industry.

Bede was founded in 1978 and is headquartered in Durham, UK. The company has sales and service offices in Denver, Colorado (USA) and Shanghai, China, as well as a global network of distributors. In Prague, Czech Republic, Reflex sro operates as a subsidiary of Bede and provides specialist X-ray technology to the Bede Group.

Contacts:

Public Relations:
Ward Hill Marketing, Inc.
Dan Esdale Program Manager
360 Merrimack Street, Bldg. 5, 3rd Floor
Lawrence MA 01843
United Kingdom
Phone: 978-794-5441
FAX: 978-688-8418
Send email  E-mail this person

Company Information:
Name: Bede
Address: Belmont Business Park
City: Durham
ZIP: DH1 1TW
Country: United Kingdom
Phone: +44 (0) 191-332-4700
FAX: +44 (0) 191-332-4800
http://www.bede.com


More New Product News from this company:
Inspection System detects wafer edge defects.
Software facilitates analysis of HRXRD data.
X-Ray Metrology Tool measures thickness from 1 nm to 10 µm.

Other News from this company:
SEMATECH to Evaluate New Materials Using Bede X-ray Metrology System
Bede X-ray Metrology and IMEC Collaboration on Process Control of New Materials Used at 45nm Nodes and Below
Bede X-ray Metrology Wins BedeMetrix(TM)-L Order from Tokyo Electron America, Inc



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