March 19, 2003 - UHP Ultra-High Purity slit valve and gate valve doors feature fluorocarbon or perfluorinated elastomer seals, chemically bonded to aluminum or steel. UHP Gate Valve Doorâ„¢ provides OEMs and chip fabricators with original and/or replacement door offering abrasion resistance and seal integrity. UHP Slit Valve Doorâ„¢ reduces potential contamination by up to 95%, while increasing wafer yield by up to 10 times.

(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)

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Ultra-High Purity Slit Valve and Gate Valve Doors Improve Productivity in Semiconductor Processing

IRVINE, CA - Parker Hannifin's Seal Group has introduced UHP (ultra-high purity) slit valve and gate valve doors that feature fluorocarbon or perfluorinated elastomer seals chemically bonded to aluminum or steel. Installed in semiconductor processing equipment, these doors dramatically reduce process contamination and downtime for maintenance and replacement.

Parker's UHP Gate Valve Doorâ„¢ is designed to provide OEMs and chip fabricators with an original and/or replacement door option that offers improved abrasion resistance and seal integrity. Particle generation is up to four times less than that of other doors, resulting in a cleaner process stream and extended service life.

Developed with a leading semiconductor manufacturer, The Parker UHP Slit Valve Doorâ„¢ also features a molded-in-place, perfluorinated or fluorocarbon elastomer seal. The bonded seal design increases service life up to ten times over doors with conventional o-ring in dovetail groove assemblies. The UHP Slit Valve Door reduces potential contamination by up to 95%, while increasing wafer yield by up to 10X.

Seals on the Parker doors are available in a variety of fluorocarbon materials, as well as Parker's Parofluorâ„¢ Series Advanced Perfluorinated Elastomers, which combine ultra-high purity with excellent resistance to extreme chemicals and high temperatures. Both door types are processed and packaged in Parker's ultra-high purity manufacturing cells using a batch-traceable statistical process control program.

In addition to sealing products such as the UHP doors, Parker has developed a range of customer resources, including a dedicated product/applications staff, finite element analysis(FEA)-assisted design and Total inPHormâ„¢, a seal design and material selection software program.

For more information on Parker's UHP doors, request free copies of the UHP Slit Valve Door Technical Bulletin (CSS 5114) and the UHP Gate Valve Door Application Bulletin (CSS 5115) by calling 1-800-C-PARKER. Or download the bulletins from Parker's online literature gallery at www.parofluor.com.

Please send inquiries to:

Mark D. Halloran

Marketing Communications Manager

Parker Hannifin Seal Group

14300 Alton Parkway

Irvine, CA 92618

Tel: (949) 851-3756

Fax: (949) 851-3798

mhalloran@parker.com

Technical Questions:

Ray Hammi

Market Manager - Semicon

Parker Hannifin Seal Group, CSS Division

7664 Panasonic Way

San Diego, CA 92154

Tel: (619) 671-3376

Fax: (619) 671-3206

rhammi@parker.com

Contacts:

Marketing:
Mark D. Halloran Marketing Communications Manager
USA
Phone: 949-851-3756
FAX: 949-851-3798

E-mail this person

Engineering:
Ray Hammi Market Manager - Semicon
USA
Phone: 619-671-3376
FAX: 619-671-3206

E-mail this person

Company Information:
Name: Parker Hannifin Corp., Seal Group
Address: 18321 Jamboree Rd.
City: Irvine
State: CA
ZIP: 92612 1073
Country: USA
Phone: 949-833-3000
FAX: 949-851-2127
http://www.parker.com

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Valve Doors reduce contamination in semiconductor processes.

Ultra-High Purity Slit Valve and Gate Valve Doors Improve Productivity in Semiconductor Processing

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