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Edwards Vacuum Technology
301 Ballardvale St.
Wilmington, MA, 01887

Detailed Contact Information:
Abatement System suits solar cell, flat panel manufacturing.   Return to story
Company Information:
Edwards Vacuum Technology
301 Ballardvale St.
Wilmington , MA  01887   USA
Phone: 978-658-5410
FAX: 978-657-6546
http://www.edwardsvacuum.com
Public Relations:
MindWrite Communications, Inc.
Sandy Fewkes
USA
Phone: 408-224-4024
Send email  E-mail this person
General Information:
Miles Firth
INTL
Phone: 44-0-1293-603451
Send email  E-mail this person
 
Latest New Product News from Edwards Vacuum Technology
Products or services this company supplies:
 
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Turbomolecular Vacuum Pump prevents powder deposition.

Turbomolecular Vacuum Pump prevents powder deposition.

Edwards Vacuum Technology    Wilmington, MA 01887
Feb 24, 2014 Pairing rotor with iXA Series on-board controller, Model STP-iXA4506 maximizes allowable gas throughput for high-flow processes. Absence of mechanical bearings virtually eliminates periodic maintenance. Operating at speeds up to 4,300 l/s N2 with throughput up to 4,330 sccm N2, pump is suitable for semiconductor etch, LCD etch, glass coating, solar PVD, and coating PVD applications. When needed, thermal management system can be added to minimize accumulation of deposits and particulates.
Dry Screw Vacuum Pumps handle large gas volumes.

Dry Screw Vacuum Pumps handle large gas volumes.

Edwards Vacuum Technology    Wilmington, MA 01887
Feb 07, 2012 With ultimate vacuum typically down to 3.8 x 10-4 Torr without purge, Models GXS450 and GXS750 deliver peak pumping speeds up to 435 cfm. When combined with booster pump, units offer speeds up to 1,978 cfm. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, which removes need to partially strip pump. Fitted with controller as standard, pumps are suited for steel degassing and metallurgy processes, glass coating, solar coating, and LED manufacture.

Dry Vacuum Pumps feature tapered screw technology.

Edwards Vacuum Technology    Wilmington, MA 01887
Oct 21, 2011 Suited for liquid and solids handling in chemical, petrochemical, and pharmaceutical processes, CXS Pumps offer vacuum down to 10-3 mbar with no contamination of process stream or cooling water and no effluent generation. Tapered screw technology gives smooth, gradual compression along length of rotor for optimized pumping at all inlet pressures. Independently certified for hazardous environments, units can pump up to 1 L of liquid/min continuously and up to 25 L slugs without stopping.
Dry Screw Vacuum Pumps are virtually maintenance-free.

Dry Screw Vacuum Pumps are virtually maintenance-free.

Edwards Vacuum Technology    Wilmington, MA 01887
Jul 07, 2010 Providing vacuum down to 1 x 10-3 mbar, GXS Series features service life up to 5 years, even in harsh applications. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, eliminating need to partially strip pump. Shafts are supported at both ends, resulting in optimized dust handling, minimized vibration, and noise levels below 64 dB(A). Applications include lamination, coating, metallurgy, pharmaceutical and food process freeze drying, and packaging.
Exhaust Management Systems use vacuum and abatement technologies.

Exhaust Management Systems use vacuum and abatement technologies.

Edwards Vacuum Technology    Wilmington, MA 01887
Mar 19, 2010 Incorporating iXH harsh process vacuum pump and Atlas(TM) gas abatement solutions, Zenith(TM) series helps address vacuum and abatement demands for advanced semiconductor processing at 60 nm and smaller design rules. It offers range of turnkey, process-centric exhaust management solutions for semiconductor manufacturing. Featuring completely integrated components, product range provides full internal distribution as well as regulation and monitoring of all services.
Abatement System suits solar cell, flat panel manufacturing.

Abatement System suits solar cell, flat panel manufacturing.

Edwards Vacuum Technology    Wilmington, MA 01887
Oct 30, 2009 Featuring integrated wet scrubbing system, Spectra ZW is used for abating deposition and clean gases used in high gas flow chemical vapor deposition process steps in solar and flat panel manufacturing. High-flow particulate and acid gas capture and processing are provided in one standalone system, which can also be integrated into Zenith for custom-built abatement and vacuum pump design. Greater than 99.5% of silica powder produced during abatement process is captured by system.
Abatement System features microwave plasma and wet scrubber.

Abatement System features microwave plasma and wet scrubber.

Edwards Vacuum Technology    Wilmington, MA 01887
Jun 17, 2008 Addressing gas abatement challenges arising from dielectric and polysilicon etch processes used in semiconductor manufacturing, Sirius(TM) 6000 system reduces fab greenhouse gas emissions by 95% over wide range of total flow rates and perfluorocompound (PFC) concentrations. High-density plasma delivers more energy to abatement process, reduces PFC gases to hydrogen fluoride (HF), and prevents creation of harmful by-products, such as carbon tetrafluoride (CF4).
Vacuum Pump suits new semiconductor manufacturing processes.

Vacuum Pump suits new semiconductor manufacturing processes.

Edwards Vacuum Technology    Wilmington, MA 01887
Feb 26, 2008 Featuring modular design, iXH series of vacuum pumps meets increasing demands of emerging processes required for semiconductor manufacturing at 60 nm and smaller design rules. Gas Buster(TM) inlet purge helps deal with process byproducts and minimize system maintenance and Active Utility Control (AUC) includes idle mode for periods when pump is not in use. Pump mechanism can handle hydrogen and also withstands corrosive effects of ammonia.
Turbomolecular Pump targets laboratory vacuum systems.

Turbomolecular Pump targets laboratory vacuum systems.

Edwards Vacuum Technology    Wilmington, MA 01887
Feb 01, 2008 Combining turbomolecular and drag stages with fluid dynamic stage, EXT406PX allows customers to build compact vacuum systems capable of withstanding high backing pressures even with continuous gas loads at main inlet. It can sustain normal operation at backing pressure of up to 17 mbar and has protection against mains variation on backing pump. System is available in 2 ranges: ISO and CF 160 with nitrogen pumping speeds of 400 L/sec and ISO and CF 100 with pumping speeds of 310 L/sec.
Dry Vacuum Pump System suits degassing of steel alloys.

Dry Vacuum Pump System suits degassing of steel alloys.

Edwards Vacuum Technology    Wilmington, MA 01887
Dec 27, 2007 Facilitating maintenance, cleaning, and waste disposal, oil-free Dry Pumping System consists of HV30000, SN7000, and IDX1000 pumps arranged in 3 stages, pre-mounted, piped, and fully wired on 2-part skid. Each skid is nominally capable of vacuum degassing 23 tons of steel, so numerous skids can be mounted in parallel and integrated with steel degassing tank to suit required ladle sizes, typically up to 160 tons or more.


Click below for more Product News from Edwards Vacuum Technology

Next News Stories



Other Company News From Edwards Vacuum Technology

Apr 12, 2010

Edwards Wins Order for Chemical Dry Pumps


Nov 19, 2009

Edwards Delivers Vacuum Carts to Diamond Light Source


Jun 04, 2009

Acoustic Enclosure Reduces Noise Level by up to Seven Decibels


Jan 19, 2009

Edwards Hires New Operations and Technology Director, Ron Krisanda


Oct 06, 2008

New Industrial Service Center, Strongsville, Ohio for Stokes and Edwards Vacuum Pumps


Sep 04, 2007

Advent Solar Purchases Multiple Abatement Systems from Edwards


Aug 28, 2007

Edwards Announces Sale of Kachina Division to Applied Materials


Feb 07, 2007

Turbo Pumps Awarded CSA/UL Approvals for OEM Market


Dec 13, 2006

Samsung Electronics Places $17M Order for Vacuum Equipment


Oct 30, 2006

BOC Edwards and Aviza Technology Announce Joint Development Agreement for Atomic Layer Deposition


Oct 16, 2006

BOC Edwards Marks 2000th IGX Dry Pump Milestone Sale


Sep 08, 2006

BOC Edwards Installs Innovative ERIX Water Treatment System at UAlbany Nanocollege's Albany Nanotech Complex


Jul 10, 2006

New Products and Services from BOC Edwards at Semicon® West 2006


Jun 05, 2006

BOC Edwards Begins Second Phase of Pipeline Network In Taiwan's Hsinchu Science Park


May 22, 2006

nLight Achieves High Power and High Brightness by Using MOCVD Tools with Integrated Vacuum and Abatement






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