Mass Flow Controllers offer multi-gas, multi-range solution.

MKS    Andover, MA 01810 2449
Jul 19, 2012 Featuring digital control architecture, P-Series/G-Series MFCs use embedded web browser application for changes in gas type and full scale flow. P-Series models, with full scale ranges from 5 sccm to 240 slm, are suited for critical mass flow applications. With integral pressure transducer, units offer pressure insensitive capabilities that maintain tight flow control in event of upstream pressure disturbance. G-Series models are intended for applications where 10 sccm to 50 slm FS range is required.

Residual Gas Analyzers support Web-based reporting, control.

MKS    Andover, MA 01810 2449
May 14, 2012 Quadrupole monitors HPQ3 and HPQ3S are PVD chamber sensors that do not require differential pumping. Able to detect single figure ppm air leaks during PVD process while simultaneously monitoring all gas species in mass range of 1-100 amu, analyzers feature ion source with dual filaments to ensure failure backup and continuous uninterrupted operation. Respectively, HPQ3 and HPQ3S provide data for processes up to total pressure of 1.3e-3 and 1e-2mbar.

Ethernet Control Module allows for dense and mixed I/O.

MKS    Andover, MA 01810 2449
Oct 03, 2011 Providing stand-alone process control platform, Model ECM2 offers real-time OS, interlock board for safety I/O, and on-board analytics, from standard SPC to advanced model-based control algorithms. Module mixes analog, digital, temperature, serial, and safety I/O, providing programming via standard programming languages, including Matlab, C++, and Ladder Logic. Processor accelerates communication over multiple protocols, while advanced diagnostics facilitate troubleshooting.

RF Power Generator suits PV, LED, and MEMS applications.

MKS    Andover, MA 01810 2449
Aug 15, 2011 Available in 2U full rack and 3U half rack enclosures, elite(TM) RF Generator comes in power levels of 300, 600, and 750 W. Full rack design eliminates cables and connectors, while inductive clamp technology protects generator from adverse VSWR load conditions. Air-cooled, single phase, 13.56 MHz generator is suited for amorphous thin film solar manufacturing, LED passivation and etch, MEMS, and semiconductor processes including PVD, CVD, ALD, strip, and etch.

Large Vacuum Chambers are offered in various materials.

MKS    Andover, MA 01810 2449
Oct 01, 2010 Custom-built, large vacuum chambers are available as cylindrical chambers of up to 96 in. long with 60 in. dia and as rectangular chambers up to 160 x 120 x 120 in. Fabricated in various materials, including stainless steel, aluminum, Hastelloy®, and Inconel®, they are suited for solar, high energy physics, and industrial coating applications. Products can be supplied as kit with instrumentation, valves, and heaters.

Compact Vacuum Valve is rated for 10,000,000 cycles.

MKS    Andover, MA 01810 2449
Jul 21, 2010 Available in angle, inline, and internal-only configurations, High Cycle Valve features stainless steel bellows that prevent outgassing, virtual leaks, and particle entrapment. High flow port sizes include NW25, NW40, and NW50, while TIG fusion welded vacuum grade body ensures less contamination build-up. For leak tight operation, elastomer seals are available in Viton® for typical operating conditions, or Kalrez® or Chemraz® for high temperature conditions and chemical resistance.

Vacuum Valves withstand harsh semiconductor and solar processes.

MKS    Andover, MA 01810 2449
Jul 09, 2010 Available in angle and inline configurations, Corrosion and Ozone Resistant Vacuum Valves utilize patented technology that completely seals off valve bellows, keeping reactive and corrosive gases from contacting and collecting on bellows surface when valve is open. Units come with air solenoid for electro-pneumatic control of valve and limit switch assembly for remote indication in open or closed position. In event of power loss, poppet valves will automatically close.

High Flow Valves feature high conductance design.

MKS    Andover, MA 01810 2449
Jul 07, 2010 Offering life of over 1,000,000 cycles, High Flow Valves feature corrosion resistant 304 stainless steel vacuum grade, fusion welded, and beaded blasted body. They can be heated to 185°C to prevent process byproducts from condensing in valve, while edge-welded bellows prevent out-gassing and virtual leaks. Available in sizes NW160 (6 in.), NW200 (8 in.), NW250 (10 in.), and NW320 (12 in.), valves can be mounted vertically or horizontally to accommodate any footprint requirement.

Ethernet Control Module features all-in-one design.

MKS    Andover, MA 01810 2449
Apr 21, 2010 Featuring high-density design that consolidates I/O units into one location, Ethernet Control Module combines analog, digital, serial, and interlock I/O connections with ability to communicate over multiple protocols. Intelligent programmability allows unit to run multiple defined sequences simultaneously, modularizing and distributing time-critical tasks close to device. The cLogic(TM) real-time logic engine distributes logic to I/O modules, allowing high-speed control as tight as 1 msec.

Residual Gas Analyzers feature web-enabled design.

MKS    Andover, MA 01810 2449
Oct 23, 2009 Featuring optimized electronics platform for data acquisition, Microvision 2 and e-Vision 2 offer stability for e-diagnostic, process monitoring, and general vacuum trouble-shooting applications. Ethernet connectivity enables users to access data from anywhere on TCP-IP network, providing solution to wide-scale multi-RGA installations. RGAs are available with variety of software control systems, including built-in web application, recipe-driven Process Eye Professional, and TOOLweb RGA.