PV Inverter delivers 97.5% CEC-weighted efficiency.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Sep 21, 2009 Operating at 500 kW, Solaron® 500E enables European commercial and utility-scale PV installations to achieve low levelized cost of energy (LCOE) by increasing energy harvests through controls as well as reducing balance-of-system and operating/maintenance costs. Transformerless design of this grid-tie photovoltaic (PV) inverter eliminates need for step-up transformer and also allows multiple inverter connections to single medium-voltage transformer.

Solar Inverter achieves 97.5% CEC-weighted efficiency.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Oct 17, 2008 Designed for utility-scale installations, 500 kW Solaron® Inverter features transformerless, grid-tie design, converting raw dc power from solar-cell arrays to ac-grid electricity. Unit includes soft-switching technology and wide maximum power point tracking window, which ensures day-long power processing. Both local and remote communications and control are always available via Solaron IDS integrated data system.

Photovoltaic Inverter provides 333 kW.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Sep 17, 2007 Suited for large commercial, grid-tie installations, transformerless Solaron(TM) Inverter converts raw DC power from solar-cell arrays to AC-grid electricity. It features soft-switching technology, achieving 97% CEC efficiency and NRTL certification to UL 1741. Wide maximum power point tracking window ensures maximum, day-long processing power. With local and remote data access, operators can monitor system's performance and reliability from anywhere at anytime.

RF Power Supply System suits etch and deposition processes.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Jul 27, 2007 Targeting semiconductor, FPD, MEMS, and solar photovoltaic manufacturing, Paramount(TM) RF-Power Delivery System enables power control and delivery across full output range, both on and off 50 W, for seamless process transitions in strip, PECVD, HDP-CVD, PVD, and PEALD. Half-rack, 3 kW unit has impedance measurement that enables power delivery and control at 13.56 MHz fixed or variable frequencies, and can keep pace with abrupt plasma-impedance changes.

Power Delivery System offers optional RF pulsing.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Jul 19, 2007 Providing repeatability in complex applications, Paramount(TM) System allows accurate process control and uniformity when etching and depositing anti-reflective coatings, hard masks, cap layers, and etch-stop layers required by next-generation nodes. Measurement technology and optional ultra-fast frequency tuning enable system to deliver precise power at 13.56 MHz fixed or variable frequency.

Optic Fiber Thermometers target semiconductor processes.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Aug 01, 2006 Designed for RTP, HDP-CVD, epi, ALD, and HDD applications, Model OR4000T provides multi-channel temperature measurement and enables integrated measurements within multiple chambers. Model OR4000E offers same performance with added real-time emissivity compensated temperature measurement and ability to support growth rate monitoring. Single-channel Model OR400T provides non-contact, in-situ temperature measurement and immunity from RF noise.

Pressure-Insensitive MFC uses NeuralStep control technology.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Jul 15, 2005 Featuring multi-gas, multi-range functionality, Aera® PI-980(TM) series helps improve processes for etch, CVD, PVD, and diffusion in semiconductor applications. Mass flow controller (MFC) promotes gas-flow stability and provides real-time process control. Combining NeuralStep(TM) control technology with integrated pressure transducer, series increases speed of MFC response, eliminating effects of upstream and downstream pressure disturbances.

DC Power Systems suit PVD applications.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Feb 22, 2005 Summit(TM) DC power conversion and control systems meet process requirements of Generation 7 and 8 flat panel displays and sub-65 nm semiconductor applications. They deliver up to 50 kW from 300-3,000 Vdc while interfacing with input power of 380-480 Vac. Units offer arc management by delivering 12 mJ of energy into plasma arc at full power. Pulsar(TM) pulsing accessory provides process control, minimizing damaging arc effects in processes requiring low contamination.

Power Delivery System suits semiconductor etch applications.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Jun 30, 2004 Fully integrated VHF Ovation(TM) delivers power up to 2.7 kW at fixed 60 MHz. It features onboard plasma measurement and enables fast, high-precision processes such as those required for sub-90 and sub-65 nm etch applications. Compact, half-rack unit delivers power into non 50 ohm environment without external sensor. It includes embedded voltage and current measurement technology for real-time data mining.

Mass Flow Controllers target plasma process environments.

Advanced Energy Industries Inc.    Fort Collins, CO 80525
Apr 12, 2004 Area® Transformer(TM) digital, multi-gas, multi-range MFCs provide field programmability to run any gas for any gas flow range from 10 sccm to 30 slm. As few as 8 different models can be used to support fab's requirements. Units allow unlimited gas selection without recalibration and can be pulled directly from customer's inventory shelf and programmed to meet requirements.