Loadlock Vacuum Pumps are suited for FPD and solar manufacturing.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Jul 06, 2012 Meeting pump down requirements of flat panel display (FPD) and solar manufacturing market, iXL250Q and iXL750Q dry pumps are designed to maximize substrate throughput while minimizing power, footprint, and weight. No maintenance is required between overhauls, and Green Mode lets pumps run at lower power during idle periods. Respectively, iXL250Q and iXL750Q provide ~250 and ~750 m³/h pumping speed around atmospheric pressure.

Dry Vacuum Pump facilitates LED/semiconductor manufacturing.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Jul 06, 2012 Suitable for use in harsh environments, corrosion-resistant iXH645H dry pump handles high flow of gases such as light hydrogen and ammonia. High-temperature capabilities prevent condensation of phosphorous compounds. Pump includes nitrogen purge barrier to protect seals, motor designed to prevent overheating or overloads, and oil lubrication and sealing to minimize maintenance. Integrated temperature control system allows full operation within 30 min of start-up.

Turbomolecular Pump employs rotray design for max performance.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Apr 17, 2012 Able to work in dirty environments, STP-iXR1606 series features IP54 protection equivalent against dust and humidity. Rotary design optimizes throughput at elevated gas flow rates and maximizes gas flow. Promoting energy conservation, fully integrated controller incorporates power supply to reduce energy consumption at elevated gas flows. Additional features include I/O remote, RS232C, RS485, and STP-link standard communication ports, with Profibus and DeviceNet available as options.

Harsh Process Dry Pumps accommodate high/low temperatures.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Oct 26, 2011 Rated to 500 m³/hr, iXH500H series is optimized for flat panel, solar, and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles. Ability to run at low pump temperatures benefits processes that use high flows of corrosive gases or processes that use thermally sensitive pre-cursors that could plate out by-products within pump. High operating temperatures can be used where risk is condensation of by-products within pump.

Dry Vacuum Pumps support solar laminator applications.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Aug 19, 2011 With chamber purge speeds of 450 and 750 m³/h, respectively, GXS 450 and 750 Series deliver rapid vacuum performance required for high throughput solar lamination processes. Optional booster package is also available to further optimize process chamber evacuation times. Operating without oil, pumps include closed-loop temperature control to prevent pump fouling, and minimized noise and vibration, which enables placement close to tool.

Hot Trap extends pump maintenance intervals.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
May 18, 2011 Designed to thermally decompose liquid diethyl zinc used in depositing some transparent conductive oxide films in thin film solar manufacturing, Hot Trap extends pump maintenance intervals from 1 week up to 6 months. Gases leaving process chamber pass through hot trap before entering vacuum pump. Heated to temperature that optimizes DEZ decomposition, trap's cartridges only require replacement on monthly basis, and can be cleaned and reused.

Vacuum Pumps are optimized for performance/footprint density.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Dec 07, 2010 Intended for solar, glass coating, semiconductor, and LCD etch applications, STP-iXA2206/iXA3306 magnetically levitated turbomolecular pumps have onboard controller and standard connection cable between pump and control. STP-iXA3306 has max pumping speed of 3,200 Lps, while STP-iXA2206 features power supply incorporated into onboard controller as well as temperature management system option. Five-axis magnetic bearing system, motor, and drive system help extend equipment life.

Dry Vacuum Pump targets semiconductor load lock applications.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Jul 13, 2010 Measuring 450 x 230 x 280 mm and weighing 59 kg, Model iXL120 consumes average energy (power at 700 T exhaust pressure) of only 550 W and offers peak pumping speed of 110 m³/hr. It incorporates oil lubricated precision bearings and timing gears, which reduce vibration during pump operation and when pump is mounted on process tool. Unit includes zero nitrogen purge option for processes without corrosive gases, and nitrogen purge option for areas with risk of corrosive gas carryover.

Dry Pump operates on as little as 3.9 kW input power.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Jul 13, 2010 Featuring optimized thermal control and dust handling capability, GXS Dry Pump supports pumping requirements for silicon ingot manufacturing and laminator applications in solar industry. Tapered variable pitch screw profile allows for tight clearances without need for rotor coatings and enables compression variations along rotor axis. Measuring 0.4 x 1.1 x 0.8 m, pump produces less than 64 db(A) noise and users inert, non-oxidizing oil to lubricate gears and bearings.

Compact Vacuum Pumps measure only 1,186 x 517 x 966 mm.

Edwards High Vacuum Int'l    Crawley East Susse, RH10 9LW
Jul 22, 2009 Available for load lock applications in solar cell and flat panel display manufacturing, iXL 500 offers pumping speed of 1,800 m³h^-1 while consuming only 7 kW of power. It is fully compatible with FabWorks(TM) network system. Maintenance free design uses long lasting oil lubrication and eliminates shaft seal by enclosing motor within vacuum.