Rudolph Appoints Yasuomi Uchida, Chairman, and Yoshiro Ogaya, President, of Rudolph Technologies Japan KK


FLANDERS, NJ (January 22, 2007)- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in high-performance process control metrology, defect inspection and data analysis for the semiconductor manufacturing industry, today announced the appointment of Yasuomi Uchida as Chairman and Yoshiro Ogaya as President of Rudolph Technologies Japan KK, effective immediately.

"Uchida will focus on new products, technologies and business development for the Japan market in his role as Chairman and Representative Director of Rudolph Technologies Japan KK, while continuing to serve as a Vice President of the parent company" said Paul McLaughlin, Chairman and Chief Executive Officer of Rudolph. Uchida has extensive semiconductor industry experience that includes Toshiba Corporation where he held several management positions.

Rudolph also announced the appointment of Yoshiro Ogaya as President of Rudolph Technologies Japan KK, stating his primary focus would be on the daily operations of the Japanese subsidiary. Ogaya spent the majority of his career with Dainippon Screen Mfg. Co. (DNS), where he served as Vice President of DNS Engineering of America for four years. Most recently, he held several management roles at Cymer Japan, Inc.

Editor Background

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com

For more information, please contact:

Investors:
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com

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