New Mass-Vac Web Site Features Detailed Application Notes
A new Web site featuring vacuum inlet traps, exhaust traps, and oil filtra-tion systems that includes detailed product descriptions, specifications, and applications notes, especially for semiconductor processes, is being introduced by Mass-Vac, Inc. of North Billerica, Massachusetts.
The Mass-Vac Web site is designed to let readers quickly find the best solution for their own vacuum equipment requirements. Included with easy to navigate buttons and embedded links are new and used vacuum equipment, vacuum pump fluids, vacuum inlet traps, exhaust traps, and oil filtration systems. Featured is a value-added section with PDF downloadable technical papers, product manuals, technical drawings and detailed application notes.
Providing process specific application notes for semiconductor and new compound semiconductor applications such as LPCVD, TEOS, polysilicon, LTO, metal etch, MOCVD, and HVPE GaN processes, the Mass-Vac Web site describes the proper vacuum inlet traps to use for each process. A chart featuring eight different filter elements and their capabilities is also included along with conversion tables a series of industry resource links.
The Mass-Vac Web site is www.massvac.com
For more information contact:
Mass-Vac, Inc.
Herbert R. Gatti, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014
e-mail: drolph@massvac.com (tech contact)
www.massvac.com
