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Original Press Release

Amtech to Exhibit at 8th Annual SNEC Solar Industry Exhibition & Conference in Shanghai, China May 20-22, 2014

Press release date: May 16, 2014

TEMPE, Ariz.– Amtech Systems, Inc. (NASDAQ: ASYS), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, semiconductors, and sapphire and silicon wafers, today announced that the Company, along with its solar subsidiary, Tempress Systems, will exhibit at the 8(th) International Photovoltaic Power Generation Conference & Exhibition (SNEC 2014) May 20-22, 2014, in Shanghai, China at the Shanghai New International Expo Center (Hall E3, Booth 330).

To enable the PV roadmap towards lower cost and higher efficiencies, Tempress Systems is introducing two main innovations at next week's SNEC 2014:

-- HD-POCl(3)™ Atmospheric High Throughput Diffusion: With throughput in
excess of 3,200 wafers per hour (WPH) Tempress Systems is taking the
next step in POCl(3) processing using special chemistry and optimized
hardware. The new system more than doubles the throughput compared to
conventional POCl(3) systems. The new POCl(3) process is being
introduced on Tempress Systems' 5-stack platform for emitter resistivity
up to 140 ohm/square. The atmospheric process enables a low maintenance
and high uptime system, while giving customers a throughput of more than
3,200WPH and outstanding efficiencies that are expected to be equal to
or better than conventional atmospheric systems. We believe these
innovations lead to the lowest cost per wafer currently available.
-- n-PASHA technology: Together with the Energy Research Centre of The
Netherlands (ECN) and Kingstone Semiconductor, a majority-owned
subsidiary of Amtech Systems, we developed the 3rd generation of n-PASHA
technology. This Ion-Implant Flow technology is currently yielding an
average efficiency in production of 20.3%, with greater than 20.8%
achieved in ongoing research and development. While achieving higher
efficiency, the cost of ownership is lower than previous generations.
This 3rd generation n-PASHA technology is part of a roadmap towards
back-contacted cell structures using standard equipment with minimal
additional process steps.

Dr. Albert Hasper, General Manager of Tempress Systems, commented: "We are very pleased that our continued investment in research and development, technologies and equipment during the industry down-cycle are now advancing our offerings into an evolving solar market. We expect these new innovations will bring our customers new solutions that enable them to reduce costs and increase efficiency. I am particularly proud of the fact that after introducing our new direct plasma SPECTRE™ PECVD system, we now offer two new innovations that can be integrated in existing and new production lines as the market looks to position itself for next generation production."

About Amtech Systems, Inc.

Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, thermal processing and ion implant equipment and related consumables used in fabricating solar cells, LED and semiconductor devices. Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products including solar cells, computers, telecommunications devices, automotive products, consumer goods, and industrial automation and control systems. The Company's wafer handling, thermal processing and consumable products currently address the diffusion, oxidation, and deposition steps used in the fabrication of solar cells, LEDs, semiconductors, MEMS and the polishing of newly sliced silicon wafers.

Amtech Systems, Inc.
Bradley C. Anderson
Chief Financial Officer
(480) 967-5146

Investor Relations
Patty Brune
(480) 201-6075

Amtech Systems, Inc.


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