Swagelok® ALD Series Valve Testing Shows Increase in Cycle Life up to 100 Million Cycles |
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Swagelok Company
31400 Aurora Road
Solon, OH, 44139-3492
USA
Press release date: July 13, 2010
SOLON, Ohio - Swagelok Company announced today that additional testing has demonstrated an increase in cycle life for its Swagelok® ALD series valve, up to 100 million cycles. The ultrahigh-purity, pneumatically actuated valve is designed for use in atomic layer deposition (ALD) processes - a staple deposition technique in the semiconductor industry.
"The demands on components used in atomic layer deposition have grown rapidly as new technologies have emerged," said John Baxter, product and technology manager, Swagelok Company. "Enhanced cycle life for ALD valves is critical for the efficient manufacture of key components from transistor gates and DRAM dielectrics to gallium arsenide nanostructures in photovoltaic cells."
Since its introduction in 2004, Swagelok ALD series valves have been a workhorse for users with UHP applications requiring rapid, precise actuation speeds. The series features valve actuation times less than 5 milliseconds and a factory-set flow adjusting mechanism for precise, consistent Cv, which enables consistent delivery of process gas. The valve's demonstrated cycle life was previously 50 million cycles.
According to Baxter, enhanced cycle life expands the valve choices for users when they are designing equipment and also helps overall total cost of ownership by lowering possible maintenance and replacement costs. More information on the ALD series valve can be found on www.swagelok.com.
Headquartered in Solon, Ohio, U.S.A., Swagelok Company is a major developer and provider of fluid system solutions, including products, assemblies, and services for the research, instrumentation, pharmaceutical, oil and gas, power, petrochemical, alternative fuels, and semiconductor industries. Its manufacturing, research, technical support, and distribution facilities support a global network of more than 200 authorized sales and service centers in 57 countries. For more information about Swagelok, visit the company's website at www.swagelok.com.
Theresa Polachek Swagelok Company 440/649-5629 Theresa.Polachek@swagelok.com
Scott Hunsberger Marcus Thomas LLC 216/292-4700 shunsberger@marcusthomasllc.com
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