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Stanford's Nanofabrication Facility and Plasma-Therm Host Plasma Processing Technical Workshop for Silicon Valley

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Plasma-Therm, LLC
10050 16th St. N.
St. Petersburg, FL, 33716

Press release date: December 11, 2012

St. Petersburg, Florida - Plasma-Therm has provided a two day plasma processing workshop at Stanford University's Nanofabrication Facility (SNF). Presentations addressed both fundamental and advanced plasma etching and deposition technologies used primarily in semiconductor device fabrication and materials science research. The Stanford facility, part of NNIN (National Nanofabrication Infrastructure Network), provides resources for both academic and industrial users and attracts researchers from throughout the world. Attendees included graduate students, facility staff, post-doctoral researchers and engineers from 13 local companies from start-ups to Fortune 500. This technology community outreach event attracted researchers involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.

The event success was reflected with positive comments from attendees: "I thoroughly enjoyed the class- I learned a lot and the slides provided valuable reference material!" Michelle Rincon, Ph.D., Process Staff Engineer Stanford Nanofabrication Facility. Many thanks for organizing a great workshop - this was both fun and extremely useful! Dr. Michael Neumann, Postdoctoral Researcher, Dept. of Physics, Stanford University "I was one of the attendees at the workshop and found it extremely useful and informative. Thanks so much for presenting it to us. Though I made notes of all the key points from today, the slides are serving as a great resource. I'm regularly referring to them as embark on a new PECVD adventure!" Aparna Aryabumi, Engineer at Kovio

"The opportunity to present and interact with the current and next generation researchers from SNF and the surrounding technical community is greatly appreciated," explained Dr. David Lishan, Plasma- Therm Principal Scientist and workshop series organizer. These well attended workshops are evidence of the interest in plasma processing and the topics in the two day workshop provide researchers an extensive set of relevant tools not often covered in traditional curriculum or training programs."

About Stanford nanofabrication Facility (SnF)
The Stanford Nanofabrication Facility (SNF) is a state- of-the-art, shared-equipment, open-use resource. This laboratory serves academic, industrial, and governmental researchers across the country and around the globe. The SNF is more than just a lab; it is a vibrant community of researchers.

Our lab members come from a wide variety of disciplines, with research in areas of optics, MEMS, biology, and chemistry, as well as process characterization and fabrication of more traditional electronics devices. We are especially committed to supporting use of micro- and nanofabrication technologies in non- traditional research applications.

SNF is housed in the Paul Allen Center for Integrated Systems building. The main facility consists of a 10,500 square foot Class 100 cleanroom that is populated with nearly 100 different instruments and fabrication tools. SNF supports a broad range of micro- and nanofabrication materials and processes. Additional information may be found at

About Plasma-Therm
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm for the last 14 years for their products and service with VLSIresearch awards. Sales and service locations throughout North America, Europe and Asia-Pacific, meet the diverse needs of Plasma-Therm's global base of over 600 customers. For further information please visit
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