Rudolph Technologies Appoints Alex Oscilowski as Chief Operating Officer


Flanders, NJ, November 27, 2006 - Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process control equipment for thin film measurements and macro-defect inspection during integrated circuit manufacturing, today announced the appointment of Alex Oscilowski as Chief Operating Officer effective immediately.

"Alex brings to Rudolph a long and distinguished career in both semiconductors and semiconductor capital equipment", said Paul F. McLaughlin, Chairman and CEO. "He comes to us directly from SEMATECH where he has been Vice President - Strategy for this, one of the world's foremost semiconductor R&D consortium. His strong leadership and global network of relationships within our customer base make Alex an excellent choice to be Rudolph's COO."

Alex spent his early career at Texas Instruments and Digital Equipment Corporation in engineering and management roles. He has been President of Kulicke & Soffa Industries responsible for the worldwide business of this industry leading semiconductor assembly equipment company.

"We welcome Alex to the Rudolph team", McLaughlin added. "I am confident that the proven operational management skills and depth of experience Alex brings will be of tremendous value to Rudolph as we execute our strategy for growth."

About Rudolph Technologies
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. Rudolph has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company's web site at www.rudolphtech.com

For more information, please contact:
Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com

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