Plasma-Therm Technical Workshop Supports Singapore's Semiconductor Technology Growth
10050 16th St. N.
St. Petersburg, FL, 33716
Press release date: July 31, 2012
150 Engineers and researchers from industry and academia attend.
St. Petersburg, Florida- Plasma-Therm's advanced plasma processing workshop, held at Singapore IMRE (Institute for Materials Research and Engineering), attracted 150 attendees to learn fundamental and advanced technology used in semiconductor device fabrication and materials research. The workshop provided support for Singapore's growing technology sector with over 20 different companies and institutes attending. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, holds these full day workshops at centers of excellence throughout the world. Attendees consisted of researchers and engineers involved in broad range of technologies that included wireless, MEMS, LEDs, power, data storage, nanoscale structures, and photonics.
Veera Sae Tae, Manager, WF Thin Film Engineering, Philips Lumileds Lighting Company expressed, "The IMRE-Plasma-Therm Technical Workshop enhanced our understanding of plasma etching and deposition processes. The topics and learning shared during the workshop are highly relevant to our scope of work. Many of the ideas derived will be incorporated into our ongoing and future development work."
Pan Liu, Senior Engineer, MICRON Singapore continued, "The workshop is great to understand the plasma etch processes from basic concepts to advanced applications. It is important to apply theories to real equipment and get solutions to improve the processing window at leading-edge technology."
Additionally, Vinod Narang, Device Analysis Laboratory Manager at Advanced Micro Devices (Singapore) concluded, "It's one of the best technical talks from equipment vendors that we have attended. Presentations lucidly covered both basics and specific issues of plasma technology.
The lecture was also thought provoking as rich physics of plasma was brought alive in lecture. The seminar will also help us in coming up with better design of experiments when working on new recipes for integrated chips failure analysis."
"The large audiences attracted to these workshops, held at leading research institutions such as IMRE, UC Berkeley, Harvard, Lund, UCLA, and others, is evidence of the interest in both the basics of plasma processing as well as advanced concepts," Dr. David Lishan, Plasma-Therm Principal Scientist and workshop director explained. "Providing graduate students, senior researchers, and engineers an interactive forum to better understand plasma etching and deposition encourages faster progress, whether it be maintaining or improving the performance of key manufacturing steps or fundamental research and development. The workshop addresses central ideas useful to the multi-disciplinary approach involved in today's technologies. The success of these events is attributed to attendees, the hosting organization and our regional representation, respectively in this case the outstanding support of IMRE and Dymek."
The Institute of Materials Research and Engineering (IMRE) is a research institute of the Science and Engineering Research Council (SERC) under Agency for Science, Technology, and Research (A*STAR). The Institute has capabilities in materials analysis & characterization, design & growth, patterning & fabrication, and synthesis & integration. IMRE houses a range of state-of-the-art equipment for materials research including development, processing and characterization, as well as conducting a wide range of research, which includes novel materials for organic solar cells, photovoltaics, printed electronics, catalysis, biomimetics, microfluidics, quantum dots, heterostructures, sustainable materials, atom technology, etc. IMRE actively collaborates with other research institutes, universities, public bodies, and a wide spectrum of industrial companies, both globally and locally.
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication. They offer leading etching and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe, and Asia-Pacific meet the diverse needs of Plasma-Therm's global customer base. For further information please visit www.plasmatherm.com.